2/7/2011	11:05:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	11:05:22 AM	Recipe started at 11:05 AM
2/7/2011	11:05:22 AM	H2 valve closed
2/7/2011	11:05:22 AM	BCl3 valve closed
2/7/2011	11:05:22 AM	PH3 valve closed
2/7/2011	11:05:22 AM	SiCl4 pre valve closed
2/7/2011	11:05:22 AM	SiCl4 post valve closed
2/7/2011	11:05:22 AM	Main Vac valve closed
2/7/2011	11:05:22 AM	Bypass valve closed
2/7/2011	11:05:22 AM	Bubbler valve closed
2/7/2011	11:05:22 AM	Helium valve opened
2/7/2011	11:05:22 AM	Helium MFC set to  500.000000
2/7/2011	11:05:22 AM	H2 MFC set to  0.000000
2/7/2011	11:05:22 AM	BCl3 MFC set to  0.000000
2/7/2011	11:05:22 AM	PHl3 MFC set to  0.000000
2/7/2011	11:05:22 AM	SiCl4 MFC set to  0.000000
2/7/2011	11:05:22 AM	Bypass solenoid MFC set to  0.000000
2/7/2011	11:05:22 AM	Tube furnace set to 0
2/7/2011	11:06:42 AM	Helium valve closed
2/7/2011	11:06:42 AM	H2 valve closed
2/7/2011	11:06:42 AM	BCl3 valve closed
2/7/2011	11:06:42 AM	PH3 valve closed
2/7/2011	11:06:42 AM	SiCl4 pre valve closed
2/7/2011	11:06:42 AM	SiCl4 post valve closed
2/7/2011	11:06:42 AM	Main Vac valve closed
2/7/2011	11:06:42 AM	Bypass valve closed
2/7/2011	11:06:42 AM	Bubbler valve closed
2/7/2011	11:06:42 AM	Helium MFC set to  0.000000
2/7/2011	11:06:42 AM	H2 MFC set to  0.000000
2/7/2011	11:06:42 AM	BCl3 MFC set to  0.000000
2/7/2011	11:06:42 AM	PHl3 MFC set to  0.000000
2/7/2011	11:06:42 AM	SiCl4 MFC set to  0.000000
2/7/2011	11:06:42 AM	Bypass solenoid MFC set to  0.000000
2/7/2011	11:06:42 AM	Tube furnace set to 0
2/7/2011	11:06:42 AM	Run finished at 11:06 AM
2/7/2011	11:06:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	11:08:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	11:08:23 AM	Recipe started at 11:08 AM
2/7/2011	11:08:23 AM	Helium valve closed
2/7/2011	11:08:23 AM	H2 valve closed
2/7/2011	11:08:23 AM	BCl3 valve closed
2/7/2011	11:08:23 AM	PH3 valve closed
2/7/2011	11:08:23 AM	SiCl4 pre valve closed
2/7/2011	11:08:23 AM	SiCl4 post valve closed
2/7/2011	11:08:23 AM	Main Vac valve closed
2/7/2011	11:08:23 AM	Bubbler valve closed
2/7/2011	11:08:23 AM	Bypass valve opened
2/7/2011	11:08:23 AM	Helium MFC set to  0.000000
2/7/2011	11:08:23 AM	H2 MFC set to  0.000000
2/7/2011	11:08:23 AM	BCl3 MFC set to  0.000000
2/7/2011	11:08:23 AM	PHl3 MFC set to  0.000000
2/7/2011	11:08:23 AM	SiCl4 MFC set to  0.000000
2/7/2011	11:08:23 AM	Bypass solenoid MFC set to  0.000000
2/7/2011	11:08:23 AM	Tube furnace set to 0
2/7/2011	11:08:53 AM	Helium valve closed
2/7/2011	11:08:53 AM	H2 valve closed
2/7/2011	11:08:53 AM	BCl3 valve closed
2/7/2011	11:08:53 AM	PH3 valve closed
2/7/2011	11:08:53 AM	SiCl4 pre valve closed
2/7/2011	11:08:53 AM	SiCl4 post valve closed
2/7/2011	11:08:53 AM	Bubbler valve closed
2/7/2011	11:08:53 AM	Main Vac valve opened
2/7/2011	11:08:53 AM	Bypass valve opened
2/7/2011	11:08:53 AM	Helium MFC set to  0.000000
2/7/2011	11:08:53 AM	H2 MFC set to  0.000000
2/7/2011	11:08:53 AM	BCl3 MFC set to  0.000000
2/7/2011	11:08:53 AM	PHl3 MFC set to  0.000000
2/7/2011	11:08:53 AM	SiCl4 MFC set to  0.000000
2/7/2011	11:08:53 AM	Bypass solenoid MFC set to  0.000000
2/7/2011	11:08:54 AM	Tube furnace set to 0
2/7/2011	11:08:54 AM	Run finished at 11:08 AM
2/7/2011	11:08:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	1:20:28 PM	Recipe started at 1:20 PM
2/7/2011	1:20:28 PM	Helium valve closed
2/7/2011	1:20:28 PM	BCl3 valve closed
2/7/2011	1:20:28 PM	PH3 valve closed
2/7/2011	1:20:28 PM	SiCl4 pre valve closed
2/7/2011	1:20:28 PM	SiCl4 post valve closed
2/7/2011	1:20:28 PM	Main Vac valve closed
2/7/2011	1:20:28 PM	Bypass valve closed
2/7/2011	1:20:28 PM	Bubbler valve closed
2/7/2011	1:20:29 PM	H2 valve opened
2/7/2011	1:20:29 PM	Helium MFC set to  0.000000
2/7/2011	1:20:29 PM	H2 MFC set to  500.000000
2/7/2011	1:20:29 PM	BCl3 MFC set to  0.000000
2/7/2011	1:20:29 PM	PHl3 MFC set to  0.000000
2/7/2011	1:20:29 PM	SiCl4 MFC set to  0.000000
2/7/2011	1:20:29 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	1:20:29 PM	Tube furnace set to 0
2/7/2011	1:21:51 PM	Helium valve closed
2/7/2011	1:21:51 PM	BCl3 valve closed
2/7/2011	1:21:51 PM	PH3 valve closed
2/7/2011	1:21:51 PM	SiCl4 pre valve closed
2/7/2011	1:21:51 PM	SiCl4 post valve closed
2/7/2011	1:21:51 PM	Main Vac valve closed
2/7/2011	1:21:51 PM	Bypass valve closed
2/7/2011	1:21:51 PM	H2 valve opened
2/7/2011	1:21:51 PM	Bubbler valve opened
2/7/2011	1:21:51 PM	Helium MFC set to  0.000000
2/7/2011	1:21:51 PM	H2 MFC set to  500.000000
2/7/2011	1:21:51 PM	BCl3 MFC set to  0.000000
2/7/2011	1:21:51 PM	PHl3 MFC set to  0.000000
2/7/2011	1:21:51 PM	SiCl4 MFC set to  0.000000
2/7/2011	1:21:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	1:21:51 PM	Tube furnace set to 1000
2/7/2011	1:41:51 PM	Helium valve closed
2/7/2011	1:41:51 PM	PH3 valve closed
2/7/2011	1:41:51 PM	Main Vac valve closed
2/7/2011	1:41:51 PM	Bypass valve closed
2/7/2011	1:41:51 PM	H2 valve opened
2/7/2011	1:41:51 PM	BCl3 valve opened
2/7/2011	1:41:51 PM	SiCl4 pre valve opened
2/7/2011	1:41:51 PM	SiCl4 post valve opened
2/7/2011	1:41:51 PM	Bubbler valve opened
2/7/2011	1:41:51 PM	Helium MFC set to  0.000000
2/7/2011	1:41:51 PM	H2 MFC set to  500.000000
2/7/2011	1:41:51 PM	BCl3 MFC set to  3.000000
2/7/2011	1:41:51 PM	PHl3 MFC set to  0.000000
2/7/2011	1:41:51 PM	SiCl4 MFC set to  50.000000
2/7/2011	1:41:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	1:41:52 PM	Tube furnace set to 1000
2/7/2011	1:56:52 PM	H2 valve closed
2/7/2011	1:56:52 PM	BCl3 valve closed
2/7/2011	1:56:52 PM	PH3 valve closed
2/7/2011	1:56:52 PM	SiCl4 pre valve closed
2/7/2011	1:56:52 PM	SiCl4 post valve closed
2/7/2011	1:56:52 PM	Main Vac valve closed
2/7/2011	1:56:52 PM	Bypass valve closed
2/7/2011	1:56:52 PM	Helium valve opened
2/7/2011	1:56:52 PM	Bubbler valve opened
2/7/2011	1:56:52 PM	Helium MFC set to  500.000000
2/7/2011	1:56:52 PM	H2 MFC set to  0.000000
2/7/2011	1:56:52 PM	BCl3 MFC set to  0.000000
2/7/2011	1:56:52 PM	PHl3 MFC set to  0.000000
2/7/2011	1:56:52 PM	SiCl4 MFC set to  0.000000
2/7/2011	1:56:52 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	1:56:52 PM	Tube furnace set to 0
2/7/2011	2:16:52 PM	Helium valve closed
2/7/2011	2:16:52 PM	H2 valve closed
2/7/2011	2:16:52 PM	BCl3 valve closed
2/7/2011	2:16:52 PM	PH3 valve closed
2/7/2011	2:16:52 PM	SiCl4 pre valve closed
2/7/2011	2:16:52 PM	SiCl4 post valve closed
2/7/2011	2:16:52 PM	Main Vac valve closed
2/7/2011	2:16:52 PM	Bypass valve closed
2/7/2011	2:16:52 PM	Bubbler valve closed
2/7/2011	2:16:52 PM	Helium MFC set to  0.000000
2/7/2011	2:16:52 PM	H2 MFC set to  0.000000
2/7/2011	2:16:52 PM	BCl3 MFC set to  0.000000
2/7/2011	2:16:52 PM	PHl3 MFC set to  0.000000
2/7/2011	2:16:52 PM	SiCl4 MFC set to  0.000000
2/7/2011	2:16:52 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	2:16:52 PM	Tube furnace set to 0
2/7/2011	2:16:52 PM	Run finished at 2:16 PM
2/7/2011	2:20:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	2:20:41 PM	Recipe started at 2:20 PM
2/7/2011	2:20:41 PM	H2 valve closed
2/7/2011	2:20:41 PM	BCl3 valve closed
2/7/2011	2:20:41 PM	PH3 valve closed
2/7/2011	2:20:41 PM	SiCl4 pre valve closed
2/7/2011	2:20:41 PM	SiCl4 post valve closed
2/7/2011	2:20:41 PM	Main Vac valve closed
2/7/2011	2:20:41 PM	Bypass valve closed
2/7/2011	2:20:41 PM	Bubbler valve closed
2/7/2011	2:20:41 PM	Helium valve opened
2/7/2011	2:20:41 PM	Helium MFC set to  500.000000
2/7/2011	2:20:41 PM	H2 MFC set to  0.000000
2/7/2011	2:20:41 PM	BCl3 MFC set to  0.000000
2/7/2011	2:20:41 PM	PHl3 MFC set to  0.000000
2/7/2011	2:20:41 PM	SiCl4 MFC set to  0.000000
2/7/2011	2:20:41 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	2:20:41 PM	Tube furnace set to 0
2/7/2011	2:20:42 PM	Helium valve closed
2/7/2011	2:20:42 PM	H2 valve closed
2/7/2011	2:20:42 PM	BCl3 valve closed
2/7/2011	2:20:42 PM	PH3 valve closed
2/7/2011	2:20:42 PM	SiCl4 pre valve closed
2/7/2011	2:20:42 PM	SiCl4 post valve closed
2/7/2011	2:20:42 PM	Main Vac valve closed
2/7/2011	2:20:42 PM	Bypass valve closed
2/7/2011	2:20:42 PM	Bubbler valve closed
2/7/2011	2:20:42 PM	Helium MFC set to  0.000000
2/7/2011	2:20:42 PM	H2 MFC set to  0.000000
2/7/2011	2:20:42 PM	BCl3 MFC set to  0.000000
2/7/2011	2:20:42 PM	PHl3 MFC set to  0.000000
2/7/2011	2:20:42 PM	SiCl4 MFC set to  0.000000
2/7/2011	2:20:42 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	2:20:43 PM	Tube furnace set to 0
2/7/2011	2:20:43 PM	Run finished at 2:20 PM
2/7/2011	2:20:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	2:24:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	2:24:50 PM	Recipe started at 2:24 PM
2/7/2011	2:24:50 PM	Helium valve closed
2/7/2011	2:24:50 PM	H2 valve closed
2/7/2011	2:24:50 PM	BCl3 valve closed
2/7/2011	2:24:50 PM	PH3 valve closed
2/7/2011	2:24:50 PM	SiCl4 pre valve closed
2/7/2011	2:24:50 PM	SiCl4 post valve closed
2/7/2011	2:24:50 PM	Main Vac valve closed
2/7/2011	2:24:50 PM	Bubbler valve closed
2/7/2011	2:24:50 PM	Bypass valve opened
2/7/2011	2:24:50 PM	Helium MFC set to  0.000000
2/7/2011	2:24:50 PM	H2 MFC set to  0.000000
2/7/2011	2:24:50 PM	BCl3 MFC set to  0.000000
2/7/2011	2:24:50 PM	PHl3 MFC set to  0.000000
2/7/2011	2:24:50 PM	SiCl4 MFC set to  0.000000
2/7/2011	2:24:50 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	2:24:51 PM	Tube furnace set to 0
2/7/2011	2:25:22 PM	Helium valve closed
2/7/2011	2:25:22 PM	H2 valve closed
2/7/2011	2:25:22 PM	BCl3 valve closed
2/7/2011	2:25:22 PM	PH3 valve closed
2/7/2011	2:25:22 PM	SiCl4 pre valve closed
2/7/2011	2:25:22 PM	SiCl4 post valve closed
2/7/2011	2:25:22 PM	Bubbler valve closed
2/7/2011	2:25:22 PM	Main Vac valve opened
2/7/2011	2:25:22 PM	Bypass valve opened
2/7/2011	2:25:22 PM	Helium MFC set to  0.000000
2/7/2011	2:25:22 PM	H2 MFC set to  0.000000
2/7/2011	2:25:22 PM	BCl3 MFC set to  0.000000
2/7/2011	2:25:22 PM	PHl3 MFC set to  0.000000
2/7/2011	2:25:22 PM	SiCl4 MFC set to  0.000000
2/7/2011	2:25:22 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	2:25:22 PM	Tube furnace set to 0
2/7/2011	2:25:22 PM	Run finished at 2:25 PM
2/7/2011	2:25:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	3:03:14 PM	Recipe started at 3:03 PM
2/7/2011	3:03:14 PM	Helium valve closed
2/7/2011	3:03:14 PM	BCl3 valve closed
2/7/2011	3:03:14 PM	PH3 valve closed
2/7/2011	3:03:14 PM	SiCl4 pre valve closed
2/7/2011	3:03:14 PM	SiCl4 post valve closed
2/7/2011	3:03:14 PM	Main Vac valve closed
2/7/2011	3:03:14 PM	Bypass valve closed
2/7/2011	3:03:14 PM	Bubbler valve closed
2/7/2011	3:03:14 PM	H2 valve opened
2/7/2011	3:03:14 PM	Helium MFC set to  0.000000
2/7/2011	3:03:14 PM	H2 MFC set to  500.000000
2/7/2011	3:03:14 PM	BCl3 MFC set to  0.000000
2/7/2011	3:03:14 PM	PHl3 MFC set to  0.000000
2/7/2011	3:03:14 PM	SiCl4 MFC set to  0.000000
2/7/2011	3:03:14 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	3:03:14 PM	Tube furnace set to 0
2/7/2011	3:04:31 PM	Helium valve closed
2/7/2011	3:04:31 PM	BCl3 valve closed
2/7/2011	3:04:31 PM	PH3 valve closed
2/7/2011	3:04:31 PM	SiCl4 pre valve closed
2/7/2011	3:04:31 PM	SiCl4 post valve closed
2/7/2011	3:04:31 PM	Main Vac valve closed
2/7/2011	3:04:31 PM	Bypass valve closed
2/7/2011	3:04:31 PM	H2 valve opened
2/7/2011	3:04:31 PM	Bubbler valve opened
2/7/2011	3:04:31 PM	Helium MFC set to  0.000000
2/7/2011	3:04:31 PM	H2 MFC set to  500.000000
2/7/2011	3:04:31 PM	BCl3 MFC set to  0.000000
2/7/2011	3:04:31 PM	PHl3 MFC set to  0.000000
2/7/2011	3:04:31 PM	SiCl4 MFC set to  0.000000
2/7/2011	3:04:31 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	3:04:31 PM	Tube furnace set to 1000
2/7/2011	3:24:31 PM	Helium valve closed
2/7/2011	3:24:31 PM	PH3 valve closed
2/7/2011	3:24:31 PM	Main Vac valve closed
2/7/2011	3:24:31 PM	Bypass valve closed
2/7/2011	3:24:31 PM	H2 valve opened
2/7/2011	3:24:31 PM	BCl3 valve opened
2/7/2011	3:24:31 PM	SiCl4 pre valve opened
2/7/2011	3:24:31 PM	SiCl4 post valve opened
2/7/2011	3:24:31 PM	Bubbler valve opened
2/7/2011	3:24:31 PM	Helium MFC set to  0.000000
2/7/2011	3:24:31 PM	H2 MFC set to  500.000000
2/7/2011	3:24:31 PM	BCl3 MFC set to  3.000000
2/7/2011	3:24:31 PM	PHl3 MFC set to  0.000000
2/7/2011	3:24:31 PM	SiCl4 MFC set to  50.000000
2/7/2011	3:24:31 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	3:24:31 PM	Tube furnace set to 1000
2/7/2011	3:39:31 PM	H2 valve closed
2/7/2011	3:39:31 PM	BCl3 valve closed
2/7/2011	3:39:31 PM	PH3 valve closed
2/7/2011	3:39:31 PM	SiCl4 pre valve closed
2/7/2011	3:39:31 PM	SiCl4 post valve closed
2/7/2011	3:39:31 PM	Main Vac valve closed
2/7/2011	3:39:31 PM	Bypass valve closed
2/7/2011	3:39:31 PM	Helium valve opened
2/7/2011	3:39:31 PM	Bubbler valve opened
2/7/2011	3:39:31 PM	Helium MFC set to  500.000000
2/7/2011	3:39:31 PM	H2 MFC set to  0.000000
2/7/2011	3:39:31 PM	BCl3 MFC set to  0.000000
2/7/2011	3:39:31 PM	PHl3 MFC set to  0.000000
2/7/2011	3:39:31 PM	SiCl4 MFC set to  0.000000
2/7/2011	3:39:31 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	3:39:31 PM	Tube furnace set to 0
2/7/2011	3:59:31 PM	Helium valve closed
2/7/2011	3:59:31 PM	H2 valve closed
2/7/2011	3:59:31 PM	BCl3 valve closed
2/7/2011	3:59:31 PM	PH3 valve closed
2/7/2011	3:59:31 PM	SiCl4 pre valve closed
2/7/2011	3:59:31 PM	SiCl4 post valve closed
2/7/2011	3:59:31 PM	Main Vac valve closed
2/7/2011	3:59:31 PM	Bypass valve closed
2/7/2011	3:59:31 PM	Bubbler valve closed
2/7/2011	3:59:31 PM	Helium MFC set to  0.000000
2/7/2011	3:59:31 PM	H2 MFC set to  0.000000
2/7/2011	3:59:31 PM	BCl3 MFC set to  0.000000
2/7/2011	3:59:31 PM	PHl3 MFC set to  0.000000
2/7/2011	3:59:31 PM	SiCl4 MFC set to  0.000000
2/7/2011	3:59:31 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	3:59:32 PM	Tube furnace set to 0
2/7/2011	3:59:32 PM	Run finished at 3:59 PM
2/7/2011	4:09:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	4:09:12 PM	Recipe started at 4:09 PM
2/7/2011	4:09:12 PM	H2 valve closed
2/7/2011	4:09:12 PM	BCl3 valve closed
2/7/2011	4:09:12 PM	PH3 valve closed
2/7/2011	4:09:12 PM	SiCl4 pre valve closed
2/7/2011	4:09:12 PM	SiCl4 post valve closed
2/7/2011	4:09:12 PM	Main Vac valve closed
2/7/2011	4:09:12 PM	Bypass valve closed
2/7/2011	4:09:12 PM	Bubbler valve closed
2/7/2011	4:09:12 PM	Helium valve opened
2/7/2011	4:09:12 PM	Helium MFC set to  500.000000
2/7/2011	4:09:12 PM	H2 MFC set to  0.000000
2/7/2011	4:09:12 PM	BCl3 MFC set to  0.000000
2/7/2011	4:09:12 PM	PHl3 MFC set to  0.000000
2/7/2011	4:09:12 PM	SiCl4 MFC set to  0.000000
2/7/2011	4:09:12 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	4:09:12 PM	Tube furnace set to 0
2/7/2011	4:09:17 PM	Helium valve closed
2/7/2011	4:09:17 PM	H2 valve closed
2/7/2011	4:09:17 PM	BCl3 valve closed
2/7/2011	4:09:17 PM	PH3 valve closed
2/7/2011	4:09:17 PM	SiCl4 pre valve closed
2/7/2011	4:09:17 PM	SiCl4 post valve closed
2/7/2011	4:09:17 PM	Main Vac valve closed
2/7/2011	4:09:17 PM	Bypass valve closed
2/7/2011	4:09:17 PM	Bubbler valve closed
2/7/2011	4:09:17 PM	Helium MFC set to  0.000000
2/7/2011	4:09:17 PM	H2 MFC set to  0.000000
2/7/2011	4:09:17 PM	BCl3 MFC set to  0.000000
2/7/2011	4:09:17 PM	PHl3 MFC set to  0.000000
2/7/2011	4:09:17 PM	SiCl4 MFC set to  0.000000
2/7/2011	4:09:17 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	4:09:18 PM	Tube furnace set to 0
2/7/2011	4:09:18 PM	Run finished at 4:09 PM
2/7/2011	4:09:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	4:38:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	4:38:37 PM	Recipe started at 4:38 PM
2/7/2011	4:38:37 PM	Helium valve closed
2/7/2011	4:38:37 PM	H2 valve closed
2/7/2011	4:38:37 PM	BCl3 valve closed
2/7/2011	4:38:37 PM	PH3 valve closed
2/7/2011	4:38:37 PM	SiCl4 pre valve closed
2/7/2011	4:38:37 PM	SiCl4 post valve closed
2/7/2011	4:38:37 PM	Main Vac valve closed
2/7/2011	4:38:37 PM	Bubbler valve closed
2/7/2011	4:38:37 PM	Bypass valve opened
2/7/2011	4:38:37 PM	Helium MFC set to  0.000000
2/7/2011	4:38:37 PM	H2 MFC set to  0.000000
2/7/2011	4:38:37 PM	BCl3 MFC set to  0.000000
2/7/2011	4:38:37 PM	PHl3 MFC set to  0.000000
2/7/2011	4:38:37 PM	SiCl4 MFC set to  0.000000
2/7/2011	4:38:37 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	4:38:38 PM	Tube furnace set to 0
2/7/2011	4:39:11 PM	Helium valve closed
2/7/2011	4:39:11 PM	H2 valve closed
2/7/2011	4:39:11 PM	BCl3 valve closed
2/7/2011	4:39:11 PM	PH3 valve closed
2/7/2011	4:39:11 PM	SiCl4 pre valve closed
2/7/2011	4:39:11 PM	SiCl4 post valve closed
2/7/2011	4:39:11 PM	Bubbler valve closed
2/7/2011	4:39:11 PM	Main Vac valve opened
2/7/2011	4:39:11 PM	Bypass valve opened
2/7/2011	4:39:11 PM	Helium MFC set to  0.000000
2/7/2011	4:39:11 PM	H2 MFC set to  0.000000
2/7/2011	4:39:11 PM	BCl3 MFC set to  0.000000
2/7/2011	4:39:11 PM	PHl3 MFC set to  0.000000
2/7/2011	4:39:11 PM	SiCl4 MFC set to  0.000000
2/7/2011	4:39:11 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	4:39:11 PM	Tube furnace set to 0
2/7/2011	4:39:11 PM	Run finished at 4:39 PM
2/7/2011	4:39:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	5:11:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/7/2011	5:11:40 PM	Recipe started at 5:11 PM
2/7/2011	5:11:40 PM	Helium valve closed
2/7/2011	5:11:40 PM	H2 valve closed
2/7/2011	5:11:40 PM	BCl3 valve closed
2/7/2011	5:11:40 PM	PH3 valve closed
2/7/2011	5:11:40 PM	SiCl4 pre valve closed
2/7/2011	5:11:40 PM	SiCl4 post valve closed
2/7/2011	5:11:40 PM	Main Vac valve closed
2/7/2011	5:11:40 PM	Bubbler valve closed
2/7/2011	5:11:40 PM	Bypass valve opened
2/7/2011	5:11:40 PM	Helium MFC set to  0.000000
2/7/2011	5:11:40 PM	H2 MFC set to  0.000000
2/7/2011	5:11:40 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:40 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:40 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:40 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:40 PM	Tube furnace set to 0
2/7/2011	5:11:40 PM	Helium valve closed
2/7/2011	5:11:40 PM	H2 valve closed
2/7/2011	5:11:40 PM	BCl3 valve closed
2/7/2011	5:11:40 PM	PH3 valve closed
2/7/2011	5:11:40 PM	SiCl4 pre valve closed
2/7/2011	5:11:40 PM	SiCl4 post valve closed
2/7/2011	5:11:40 PM	Bubbler valve closed
2/7/2011	5:11:40 PM	Main Vac valve opened
2/7/2011	5:11:40 PM	Bypass valve opened
2/7/2011	5:11:40 PM	Helium MFC set to  0.000000
2/7/2011	5:11:40 PM	H2 MFC set to  0.000000
2/7/2011	5:11:40 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:40 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:40 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:40 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:41 PM	Tube furnace set to 0
2/7/2011	5:11:43 PM	H2 valve closed
2/7/2011	5:11:43 PM	BCl3 valve closed
2/7/2011	5:11:43 PM	PH3 valve closed
2/7/2011	5:11:43 PM	SiCl4 pre valve closed
2/7/2011	5:11:43 PM	SiCl4 post valve closed
2/7/2011	5:11:43 PM	Bubbler valve closed
2/7/2011	5:11:43 PM	Helium valve opened
2/7/2011	5:11:43 PM	Main Vac valve opened
2/7/2011	5:11:43 PM	Bypass valve opened
2/7/2011	5:11:43 PM	Helium MFC set to  100.000000
2/7/2011	5:11:43 PM	H2 MFC set to  0.000000
2/7/2011	5:11:43 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:43 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:43 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:43 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:43 PM	Tube furnace set to 0
2/7/2011	5:11:43 PM	Helium valve closed
2/7/2011	5:11:43 PM	H2 valve closed
2/7/2011	5:11:43 PM	BCl3 valve closed
2/7/2011	5:11:43 PM	PH3 valve closed
2/7/2011	5:11:43 PM	SiCl4 pre valve closed
2/7/2011	5:11:43 PM	SiCl4 post valve closed
2/7/2011	5:11:43 PM	Bubbler valve closed
2/7/2011	5:11:43 PM	Main Vac valve opened
2/7/2011	5:11:43 PM	Bypass valve opened
2/7/2011	5:11:43 PM	Helium MFC set to  0.000000
2/7/2011	5:11:43 PM	H2 MFC set to  0.000000
2/7/2011	5:11:43 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:43 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:43 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:43 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:43 PM	Tube furnace set to 0
2/7/2011	5:11:47 PM	H2 valve closed
2/7/2011	5:11:47 PM	BCl3 valve closed
2/7/2011	5:11:47 PM	PH3 valve closed
2/7/2011	5:11:47 PM	SiCl4 pre valve closed
2/7/2011	5:11:47 PM	SiCl4 post valve closed
2/7/2011	5:11:47 PM	Bubbler valve closed
2/7/2011	5:11:47 PM	Helium valve opened
2/7/2011	5:11:47 PM	Main Vac valve opened
2/7/2011	5:11:47 PM	Bypass valve opened
2/7/2011	5:11:47 PM	Helium MFC set to  100.000000
2/7/2011	5:11:47 PM	H2 MFC set to  0.000000
2/7/2011	5:11:47 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:47 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:47 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:47 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:47 PM	Tube furnace set to 0
2/7/2011	5:11:47 PM	Helium valve closed
2/7/2011	5:11:47 PM	H2 valve closed
2/7/2011	5:11:47 PM	BCl3 valve closed
2/7/2011	5:11:47 PM	PH3 valve closed
2/7/2011	5:11:47 PM	SiCl4 pre valve closed
2/7/2011	5:11:47 PM	SiCl4 post valve closed
2/7/2011	5:11:47 PM	Bubbler valve closed
2/7/2011	5:11:47 PM	Main Vac valve opened
2/7/2011	5:11:47 PM	Bypass valve opened
2/7/2011	5:11:47 PM	Helium MFC set to  0.000000
2/7/2011	5:11:47 PM	H2 MFC set to  0.000000
2/7/2011	5:11:47 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:47 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:47 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:47 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:48 PM	Tube furnace set to 0
2/7/2011	5:11:49 PM	H2 valve closed
2/7/2011	5:11:49 PM	BCl3 valve closed
2/7/2011	5:11:49 PM	PH3 valve closed
2/7/2011	5:11:49 PM	SiCl4 pre valve closed
2/7/2011	5:11:49 PM	SiCl4 post valve closed
2/7/2011	5:11:49 PM	Bubbler valve closed
2/7/2011	5:11:49 PM	Helium valve opened
2/7/2011	5:11:49 PM	Main Vac valve opened
2/7/2011	5:11:49 PM	Bypass valve opened
2/7/2011	5:11:49 PM	Helium MFC set to  100.000000
2/7/2011	5:11:49 PM	H2 MFC set to  0.000000
2/7/2011	5:11:49 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:49 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:49 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:49 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:49 PM	Tube furnace set to 0
2/7/2011	5:11:49 PM	Helium valve closed
2/7/2011	5:11:49 PM	H2 valve closed
2/7/2011	5:11:49 PM	BCl3 valve closed
2/7/2011	5:11:49 PM	PH3 valve closed
2/7/2011	5:11:49 PM	SiCl4 pre valve closed
2/7/2011	5:11:49 PM	SiCl4 post valve closed
2/7/2011	5:11:49 PM	Bubbler valve closed
2/7/2011	5:11:49 PM	Main Vac valve opened
2/7/2011	5:11:49 PM	Bypass valve opened
2/7/2011	5:11:49 PM	Helium MFC set to  0.000000
2/7/2011	5:11:49 PM	H2 MFC set to  0.000000
2/7/2011	5:11:49 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:49 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:49 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:49 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:49 PM	Tube furnace set to 0
2/7/2011	5:11:50 PM	H2 valve closed
2/7/2011	5:11:50 PM	BCl3 valve closed
2/7/2011	5:11:50 PM	PH3 valve closed
2/7/2011	5:11:50 PM	SiCl4 pre valve closed
2/7/2011	5:11:50 PM	SiCl4 post valve closed
2/7/2011	5:11:50 PM	Bubbler valve closed
2/7/2011	5:11:50 PM	Helium valve opened
2/7/2011	5:11:50 PM	Main Vac valve opened
2/7/2011	5:11:50 PM	Bypass valve opened
2/7/2011	5:11:50 PM	Helium MFC set to  100.000000
2/7/2011	5:11:50 PM	H2 MFC set to  0.000000
2/7/2011	5:11:50 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:50 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:50 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:50 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:50 PM	Tube furnace set to 0
2/7/2011	5:11:51 PM	Helium valve closed
2/7/2011	5:11:51 PM	H2 valve closed
2/7/2011	5:11:51 PM	BCl3 valve closed
2/7/2011	5:11:51 PM	PH3 valve closed
2/7/2011	5:11:51 PM	SiCl4 pre valve closed
2/7/2011	5:11:51 PM	SiCl4 post valve closed
2/7/2011	5:11:51 PM	Bubbler valve closed
2/7/2011	5:11:51 PM	Main Vac valve opened
2/7/2011	5:11:51 PM	Bypass valve opened
2/7/2011	5:11:51 PM	Helium MFC set to  0.000000
2/7/2011	5:11:51 PM	H2 MFC set to  0.000000
2/7/2011	5:11:51 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:51 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:51 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:51 PM	Tube furnace set to 0
2/7/2011	5:11:52 PM	H2 valve closed
2/7/2011	5:11:52 PM	BCl3 valve closed
2/7/2011	5:11:52 PM	PH3 valve closed
2/7/2011	5:11:52 PM	SiCl4 pre valve closed
2/7/2011	5:11:52 PM	SiCl4 post valve closed
2/7/2011	5:11:52 PM	Bubbler valve closed
2/7/2011	5:11:52 PM	Helium valve opened
2/7/2011	5:11:52 PM	Main Vac valve opened
2/7/2011	5:11:52 PM	Bypass valve opened
2/7/2011	5:11:52 PM	Helium MFC set to  100.000000
2/7/2011	5:11:52 PM	H2 MFC set to  0.000000
2/7/2011	5:11:52 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:52 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:52 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:52 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:52 PM	Tube furnace set to 0
2/7/2011	5:11:53 PM	Helium valve closed
2/7/2011	5:11:53 PM	H2 valve closed
2/7/2011	5:11:53 PM	BCl3 valve closed
2/7/2011	5:11:53 PM	PH3 valve closed
2/7/2011	5:11:53 PM	SiCl4 pre valve closed
2/7/2011	5:11:53 PM	SiCl4 post valve closed
2/7/2011	5:11:53 PM	Bubbler valve closed
2/7/2011	5:11:53 PM	Main Vac valve opened
2/7/2011	5:11:53 PM	Bypass valve opened
2/7/2011	5:11:53 PM	Helium MFC set to  0.000000
2/7/2011	5:11:53 PM	H2 MFC set to  0.000000
2/7/2011	5:11:53 PM	BCl3 MFC set to  0.000000
2/7/2011	5:11:53 PM	PHl3 MFC set to  0.000000
2/7/2011	5:11:53 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:11:53 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:11:53 PM	Tube furnace set to 0
2/7/2011	5:12:53 PM	H2 valve closed
2/7/2011	5:12:53 PM	BCl3 valve closed
2/7/2011	5:12:53 PM	PH3 valve closed
2/7/2011	5:12:53 PM	SiCl4 pre valve closed
2/7/2011	5:12:53 PM	SiCl4 post valve closed
2/7/2011	5:12:53 PM	Bubbler valve closed
2/7/2011	5:12:53 PM	Helium valve opened
2/7/2011	5:12:53 PM	Main Vac valve opened
2/7/2011	5:12:53 PM	Bypass valve opened
2/7/2011	5:12:53 PM	Helium MFC set to  100.000000
2/7/2011	5:12:53 PM	H2 MFC set to  0.000000
2/7/2011	5:12:53 PM	BCl3 MFC set to  0.000000
2/7/2011	5:12:53 PM	PHl3 MFC set to  0.000000
2/7/2011	5:12:53 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:12:53 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:12:53 PM	Tube furnace set to 0
2/7/2011	5:13:53 PM	Helium valve closed
2/7/2011	5:13:53 PM	H2 valve closed
2/7/2011	5:13:53 PM	BCl3 valve closed
2/7/2011	5:13:53 PM	PH3 valve closed
2/7/2011	5:13:53 PM	SiCl4 pre valve closed
2/7/2011	5:13:53 PM	SiCl4 post valve closed
2/7/2011	5:13:53 PM	Bubbler valve closed
2/7/2011	5:13:53 PM	Main Vac valve opened
2/7/2011	5:13:53 PM	Bypass valve opened
2/7/2011	5:13:53 PM	Helium MFC set to  0.000000
2/7/2011	5:13:53 PM	H2 MFC set to  0.000000
2/7/2011	5:13:53 PM	BCl3 MFC set to  0.000000
2/7/2011	5:13:53 PM	PHl3 MFC set to  0.000000
2/7/2011	5:13:53 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:13:53 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:13:53 PM	Tube furnace set to 0
2/7/2011	5:14:53 PM	H2 valve closed
2/7/2011	5:14:53 PM	BCl3 valve closed
2/7/2011	5:14:53 PM	PH3 valve closed
2/7/2011	5:14:53 PM	SiCl4 pre valve closed
2/7/2011	5:14:53 PM	SiCl4 post valve closed
2/7/2011	5:14:53 PM	Bubbler valve closed
2/7/2011	5:14:53 PM	Helium valve opened
2/7/2011	5:14:53 PM	Main Vac valve opened
2/7/2011	5:14:53 PM	Bypass valve opened
2/7/2011	5:14:53 PM	Helium MFC set to  100.000000
2/7/2011	5:14:53 PM	H2 MFC set to  0.000000
2/7/2011	5:14:53 PM	BCl3 MFC set to  0.000000
2/7/2011	5:14:53 PM	PHl3 MFC set to  0.000000
2/7/2011	5:14:53 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:14:53 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:14:53 PM	Tube furnace set to 0
2/7/2011	5:15:53 PM	Helium valve closed
2/7/2011	5:15:53 PM	H2 valve closed
2/7/2011	5:15:53 PM	BCl3 valve closed
2/7/2011	5:15:53 PM	PH3 valve closed
2/7/2011	5:15:53 PM	SiCl4 pre valve closed
2/7/2011	5:15:53 PM	SiCl4 post valve closed
2/7/2011	5:15:53 PM	Bubbler valve closed
2/7/2011	5:15:53 PM	Main Vac valve opened
2/7/2011	5:15:53 PM	Bypass valve opened
2/7/2011	5:15:53 PM	Helium MFC set to  0.000000
2/7/2011	5:15:53 PM	H2 MFC set to  0.000000
2/7/2011	5:15:53 PM	BCl3 MFC set to  0.000000
2/7/2011	5:15:53 PM	PHl3 MFC set to  0.000000
2/7/2011	5:15:53 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:15:53 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:15:54 PM	Tube furnace set to 0
2/7/2011	5:16:54 PM	H2 valve closed
2/7/2011	5:16:54 PM	BCl3 valve closed
2/7/2011	5:16:54 PM	PH3 valve closed
2/7/2011	5:16:54 PM	SiCl4 pre valve closed
2/7/2011	5:16:54 PM	SiCl4 post valve closed
2/7/2011	5:16:54 PM	Bubbler valve closed
2/7/2011	5:16:54 PM	Helium valve opened
2/7/2011	5:16:54 PM	Main Vac valve opened
2/7/2011	5:16:54 PM	Bypass valve opened
2/7/2011	5:16:54 PM	Helium MFC set to  100.000000
2/7/2011	5:16:54 PM	H2 MFC set to  0.000000
2/7/2011	5:16:54 PM	BCl3 MFC set to  0.000000
2/7/2011	5:16:54 PM	PHl3 MFC set to  0.000000
2/7/2011	5:16:54 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:16:54 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:16:54 PM	Tube furnace set to 0
2/7/2011	5:17:54 PM	Helium valve closed
2/7/2011	5:17:54 PM	H2 valve closed
2/7/2011	5:17:54 PM	BCl3 valve closed
2/7/2011	5:17:54 PM	PH3 valve closed
2/7/2011	5:17:54 PM	SiCl4 pre valve closed
2/7/2011	5:17:54 PM	SiCl4 post valve closed
2/7/2011	5:17:54 PM	Bubbler valve closed
2/7/2011	5:17:54 PM	Main Vac valve opened
2/7/2011	5:17:54 PM	Bypass valve opened
2/7/2011	5:17:54 PM	Helium MFC set to  0.000000
2/7/2011	5:17:54 PM	H2 MFC set to  0.000000
2/7/2011	5:17:54 PM	BCl3 MFC set to  0.000000
2/7/2011	5:17:54 PM	PHl3 MFC set to  0.000000
2/7/2011	5:17:54 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:17:54 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:17:54 PM	Tube furnace set to 0
2/7/2011	5:18:54 PM	H2 valve closed
2/7/2011	5:18:54 PM	BCl3 valve closed
2/7/2011	5:18:54 PM	PH3 valve closed
2/7/2011	5:18:54 PM	SiCl4 pre valve closed
2/7/2011	5:18:54 PM	SiCl4 post valve closed
2/7/2011	5:18:54 PM	Bubbler valve closed
2/7/2011	5:18:54 PM	Helium valve opened
2/7/2011	5:18:54 PM	Main Vac valve opened
2/7/2011	5:18:54 PM	Bypass valve opened
2/7/2011	5:18:54 PM	Helium MFC set to  100.000000
2/7/2011	5:18:54 PM	H2 MFC set to  0.000000
2/7/2011	5:18:54 PM	BCl3 MFC set to  0.000000
2/7/2011	5:18:54 PM	PHl3 MFC set to  0.000000
2/7/2011	5:18:54 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:18:54 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:18:54 PM	Tube furnace set to 0
2/7/2011	5:19:54 PM	Helium valve closed
2/7/2011	5:19:54 PM	H2 valve closed
2/7/2011	5:19:54 PM	BCl3 valve closed
2/7/2011	5:19:54 PM	PH3 valve closed
2/7/2011	5:19:54 PM	SiCl4 pre valve closed
2/7/2011	5:19:54 PM	SiCl4 post valve closed
2/7/2011	5:19:54 PM	Bubbler valve closed
2/7/2011	5:19:54 PM	Main Vac valve opened
2/7/2011	5:19:54 PM	Bypass valve opened
2/7/2011	5:19:54 PM	Helium MFC set to  0.000000
2/7/2011	5:19:54 PM	H2 MFC set to  0.000000
2/7/2011	5:19:54 PM	BCl3 MFC set to  0.000000
2/7/2011	5:19:54 PM	PHl3 MFC set to  0.000000
2/7/2011	5:19:54 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:19:54 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:19:54 PM	Tube furnace set to 0
2/7/2011	5:20:54 PM	H2 valve closed
2/7/2011	5:20:54 PM	BCl3 valve closed
2/7/2011	5:20:54 PM	PH3 valve closed
2/7/2011	5:20:54 PM	SiCl4 pre valve closed
2/7/2011	5:20:54 PM	SiCl4 post valve closed
2/7/2011	5:20:54 PM	Bubbler valve closed
2/7/2011	5:20:54 PM	Helium valve opened
2/7/2011	5:20:54 PM	Main Vac valve opened
2/7/2011	5:20:54 PM	Bypass valve opened
2/7/2011	5:20:54 PM	Helium MFC set to  100.000000
2/7/2011	5:20:54 PM	H2 MFC set to  0.000000
2/7/2011	5:20:54 PM	BCl3 MFC set to  0.000000
2/7/2011	5:20:54 PM	PHl3 MFC set to  0.000000
2/7/2011	5:20:54 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:20:54 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:20:55 PM	Tube furnace set to 0
2/7/2011	5:21:55 PM	Helium valve closed
2/7/2011	5:21:55 PM	H2 valve closed
2/7/2011	5:21:55 PM	BCl3 valve closed
2/7/2011	5:21:55 PM	PH3 valve closed
2/7/2011	5:21:55 PM	SiCl4 pre valve closed
2/7/2011	5:21:55 PM	SiCl4 post valve closed
2/7/2011	5:21:55 PM	Bubbler valve closed
2/7/2011	5:21:55 PM	Main Vac valve opened
2/7/2011	5:21:55 PM	Bypass valve opened
2/7/2011	5:21:55 PM	Helium MFC set to  0.000000
2/7/2011	5:21:55 PM	H2 MFC set to  0.000000
2/7/2011	5:21:55 PM	BCl3 MFC set to  0.000000
2/7/2011	5:21:55 PM	PHl3 MFC set to  0.000000
2/7/2011	5:21:55 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:21:55 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:21:55 PM	Tube furnace set to 0
2/7/2011	5:21:56 PM	Run finished at 5:21 PM
2/7/2011	5:21:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/7/2011	5:26:18 PM	Recipe started at 5:26 PM
2/7/2011	5:26:18 PM	Helium valve closed
2/7/2011	5:26:18 PM	BCl3 valve closed
2/7/2011	5:26:18 PM	PH3 valve closed
2/7/2011	5:26:18 PM	SiCl4 pre valve closed
2/7/2011	5:26:18 PM	SiCl4 post valve closed
2/7/2011	5:26:18 PM	Main Vac valve closed
2/7/2011	5:26:18 PM	Bypass valve closed
2/7/2011	5:26:18 PM	Bubbler valve closed
2/7/2011	5:26:18 PM	H2 valve opened
2/7/2011	5:26:18 PM	Helium MFC set to  0.000000
2/7/2011	5:26:18 PM	H2 MFC set to  500.000000
2/7/2011	5:26:18 PM	BCl3 MFC set to  0.000000
2/7/2011	5:26:18 PM	PHl3 MFC set to  0.000000
2/7/2011	5:26:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:26:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:26:18 PM	Tube furnace set to 0
2/7/2011	5:27:40 PM	Helium valve closed
2/7/2011	5:27:40 PM	BCl3 valve closed
2/7/2011	5:27:40 PM	PH3 valve closed
2/7/2011	5:27:40 PM	SiCl4 pre valve closed
2/7/2011	5:27:40 PM	SiCl4 post valve closed
2/7/2011	5:27:40 PM	Main Vac valve closed
2/7/2011	5:27:40 PM	Bypass valve closed
2/7/2011	5:27:40 PM	H2 valve opened
2/7/2011	5:27:40 PM	Bubbler valve opened
2/7/2011	5:27:40 PM	Helium MFC set to  0.000000
2/7/2011	5:27:40 PM	H2 MFC set to  500.000000
2/7/2011	5:27:40 PM	BCl3 MFC set to  0.000000
2/7/2011	5:27:40 PM	PHl3 MFC set to  0.000000
2/7/2011	5:27:40 PM	SiCl4 MFC set to  0.000000
2/7/2011	5:27:40 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:27:40 PM	Tube furnace set to 1000
2/7/2011	5:47:40 PM	Helium valve closed
2/7/2011	5:47:40 PM	PH3 valve closed
2/7/2011	5:47:40 PM	Main Vac valve closed
2/7/2011	5:47:40 PM	Bypass valve closed
2/7/2011	5:47:40 PM	H2 valve opened
2/7/2011	5:47:40 PM	BCl3 valve opened
2/7/2011	5:47:40 PM	SiCl4 pre valve opened
2/7/2011	5:47:40 PM	SiCl4 post valve opened
2/7/2011	5:47:40 PM	Bubbler valve opened
2/7/2011	5:47:40 PM	Helium MFC set to  0.000000
2/7/2011	5:47:40 PM	H2 MFC set to  500.000000
2/7/2011	5:47:40 PM	BCl3 MFC set to  3.000000
2/7/2011	5:47:40 PM	PHl3 MFC set to  0.000000
2/7/2011	5:47:40 PM	SiCl4 MFC set to  50.000000
2/7/2011	5:47:40 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	5:47:40 PM	Tube furnace set to 1000
2/7/2011	6:02:40 PM	H2 valve closed
2/7/2011	6:02:40 PM	BCl3 valve closed
2/7/2011	6:02:40 PM	PH3 valve closed
2/7/2011	6:02:40 PM	SiCl4 pre valve closed
2/7/2011	6:02:40 PM	SiCl4 post valve closed
2/7/2011	6:02:40 PM	Main Vac valve closed
2/7/2011	6:02:40 PM	Bypass valve closed
2/7/2011	6:02:40 PM	Helium valve opened
2/7/2011	6:02:40 PM	Bubbler valve opened
2/7/2011	6:02:40 PM	Helium MFC set to  500.000000
2/7/2011	6:02:40 PM	H2 MFC set to  0.000000
2/7/2011	6:02:40 PM	BCl3 MFC set to  0.000000
2/7/2011	6:02:40 PM	PHl3 MFC set to  0.000000
2/7/2011	6:02:40 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:02:40 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:02:40 PM	Tube furnace set to 0
2/7/2011	6:22:40 PM	Helium valve closed
2/7/2011	6:22:40 PM	H2 valve closed
2/7/2011	6:22:40 PM	BCl3 valve closed
2/7/2011	6:22:40 PM	PH3 valve closed
2/7/2011	6:22:40 PM	SiCl4 pre valve closed
2/7/2011	6:22:40 PM	SiCl4 post valve closed
2/7/2011	6:22:40 PM	Main Vac valve closed
2/7/2011	6:22:40 PM	Bypass valve closed
2/7/2011	6:22:40 PM	Bubbler valve closed
2/7/2011	6:22:40 PM	Helium MFC set to  0.000000
2/7/2011	6:22:40 PM	H2 MFC set to  0.000000
2/7/2011	6:22:40 PM	BCl3 MFC set to  0.000000
2/7/2011	6:22:40 PM	PHl3 MFC set to  0.000000
2/7/2011	6:22:40 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:22:40 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:22:40 PM	Tube furnace set to 0
2/7/2011	6:22:41 PM	Run finished at 6:22 PM
2/7/2011	6:28:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	6:28:38 PM	Recipe started at 6:28 PM
2/7/2011	6:28:38 PM	H2 valve closed
2/7/2011	6:28:38 PM	BCl3 valve closed
2/7/2011	6:28:38 PM	PH3 valve closed
2/7/2011	6:28:38 PM	SiCl4 pre valve closed
2/7/2011	6:28:38 PM	SiCl4 post valve closed
2/7/2011	6:28:38 PM	Main Vac valve closed
2/7/2011	6:28:38 PM	Bypass valve closed
2/7/2011	6:28:38 PM	Bubbler valve closed
2/7/2011	6:28:38 PM	Helium valve opened
2/7/2011	6:28:38 PM	Helium MFC set to  500.000000
2/7/2011	6:28:38 PM	H2 MFC set to  0.000000
2/7/2011	6:28:38 PM	BCl3 MFC set to  0.000000
2/7/2011	6:28:38 PM	PHl3 MFC set to  0.000000
2/7/2011	6:28:38 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:28:38 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:28:38 PM	Tube furnace set to 0
2/7/2011	6:28:41 PM	Helium valve closed
2/7/2011	6:28:41 PM	H2 valve closed
2/7/2011	6:28:41 PM	BCl3 valve closed
2/7/2011	6:28:41 PM	PH3 valve closed
2/7/2011	6:28:41 PM	SiCl4 pre valve closed
2/7/2011	6:28:41 PM	SiCl4 post valve closed
2/7/2011	6:28:41 PM	Main Vac valve closed
2/7/2011	6:28:41 PM	Bypass valve closed
2/7/2011	6:28:41 PM	Bubbler valve closed
2/7/2011	6:28:41 PM	Helium MFC set to  0.000000
2/7/2011	6:28:41 PM	H2 MFC set to  0.000000
2/7/2011	6:28:41 PM	BCl3 MFC set to  0.000000
2/7/2011	6:28:41 PM	PHl3 MFC set to  0.000000
2/7/2011	6:28:41 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:28:41 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:28:41 PM	Tube furnace set to 0
2/7/2011	6:28:41 PM	Run finished at 6:28 PM
2/7/2011	6:28:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	6:41:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	6:41:21 PM	Recipe started at 6:41 PM
2/7/2011	6:41:21 PM	Helium valve closed
2/7/2011	6:41:21 PM	H2 valve closed
2/7/2011	6:41:21 PM	BCl3 valve closed
2/7/2011	6:41:21 PM	PH3 valve closed
2/7/2011	6:41:21 PM	SiCl4 pre valve closed
2/7/2011	6:41:21 PM	SiCl4 post valve closed
2/7/2011	6:41:21 PM	Main Vac valve closed
2/7/2011	6:41:21 PM	Bubbler valve closed
2/7/2011	6:41:21 PM	Bypass valve opened
2/7/2011	6:41:21 PM	Helium MFC set to  0.000000
2/7/2011	6:41:21 PM	H2 MFC set to  0.000000
2/7/2011	6:41:21 PM	BCl3 MFC set to  0.000000
2/7/2011	6:41:21 PM	PHl3 MFC set to  0.000000
2/7/2011	6:41:21 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:41:21 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:41:21 PM	Tube furnace set to 0
2/7/2011	6:41:54 PM	Helium valve closed
2/7/2011	6:41:54 PM	H2 valve closed
2/7/2011	6:41:54 PM	BCl3 valve closed
2/7/2011	6:41:54 PM	PH3 valve closed
2/7/2011	6:41:54 PM	SiCl4 pre valve closed
2/7/2011	6:41:54 PM	SiCl4 post valve closed
2/7/2011	6:41:54 PM	Bubbler valve closed
2/7/2011	6:41:54 PM	Main Vac valve opened
2/7/2011	6:41:54 PM	Bypass valve opened
2/7/2011	6:41:54 PM	Helium MFC set to  0.000000
2/7/2011	6:41:54 PM	H2 MFC set to  0.000000
2/7/2011	6:41:54 PM	BCl3 MFC set to  0.000000
2/7/2011	6:41:54 PM	PHl3 MFC set to  0.000000
2/7/2011	6:41:54 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:41:54 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:41:55 PM	Tube furnace set to 0
2/7/2011	6:41:55 PM	Run finished at 6:41 PM
2/7/2011	6:41:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	6:42:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/7/2011	6:42:15 PM	Recipe started at 6:42 PM
2/7/2011	6:42:15 PM	Helium valve closed
2/7/2011	6:42:15 PM	H2 valve closed
2/7/2011	6:42:15 PM	BCl3 valve closed
2/7/2011	6:42:15 PM	PH3 valve closed
2/7/2011	6:42:15 PM	SiCl4 pre valve closed
2/7/2011	6:42:15 PM	SiCl4 post valve closed
2/7/2011	6:42:15 PM	Main Vac valve closed
2/7/2011	6:42:15 PM	Bubbler valve closed
2/7/2011	6:42:15 PM	Bypass valve opened
2/7/2011	6:42:15 PM	Helium MFC set to  0.000000
2/7/2011	6:42:15 PM	H2 MFC set to  0.000000
2/7/2011	6:42:15 PM	BCl3 MFC set to  0.000000
2/7/2011	6:42:15 PM	PHl3 MFC set to  0.000000
2/7/2011	6:42:15 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:42:15 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:42:15 PM	Tube furnace set to 0
2/7/2011	6:42:16 PM	Helium valve closed
2/7/2011	6:42:16 PM	H2 valve closed
2/7/2011	6:42:16 PM	BCl3 valve closed
2/7/2011	6:42:16 PM	PH3 valve closed
2/7/2011	6:42:16 PM	SiCl4 pre valve closed
2/7/2011	6:42:16 PM	SiCl4 post valve closed
2/7/2011	6:42:16 PM	Bubbler valve closed
2/7/2011	6:42:16 PM	Main Vac valve opened
2/7/2011	6:42:16 PM	Bypass valve opened
2/7/2011	6:42:16 PM	Helium MFC set to  0.000000
2/7/2011	6:42:16 PM	H2 MFC set to  0.000000
2/7/2011	6:42:16 PM	BCl3 MFC set to  0.000000
2/7/2011	6:42:16 PM	PHl3 MFC set to  0.000000
2/7/2011	6:42:16 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:42:16 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:42:16 PM	Tube furnace set to 0
2/7/2011	6:43:16 PM	H2 valve closed
2/7/2011	6:43:16 PM	BCl3 valve closed
2/7/2011	6:43:16 PM	PH3 valve closed
2/7/2011	6:43:16 PM	SiCl4 pre valve closed
2/7/2011	6:43:16 PM	SiCl4 post valve closed
2/7/2011	6:43:16 PM	Bubbler valve closed
2/7/2011	6:43:16 PM	Helium valve opened
2/7/2011	6:43:16 PM	Main Vac valve opened
2/7/2011	6:43:16 PM	Bypass valve opened
2/7/2011	6:43:16 PM	Helium MFC set to  100.000000
2/7/2011	6:43:16 PM	H2 MFC set to  0.000000
2/7/2011	6:43:16 PM	BCl3 MFC set to  0.000000
2/7/2011	6:43:16 PM	PHl3 MFC set to  0.000000
2/7/2011	6:43:16 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:43:16 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:43:16 PM	Tube furnace set to 0
2/7/2011	6:44:16 PM	Helium valve closed
2/7/2011	6:44:16 PM	H2 valve closed
2/7/2011	6:44:16 PM	BCl3 valve closed
2/7/2011	6:44:16 PM	PH3 valve closed
2/7/2011	6:44:16 PM	SiCl4 pre valve closed
2/7/2011	6:44:16 PM	SiCl4 post valve closed
2/7/2011	6:44:16 PM	Bubbler valve closed
2/7/2011	6:44:16 PM	Main Vac valve opened
2/7/2011	6:44:16 PM	Bypass valve opened
2/7/2011	6:44:16 PM	Helium MFC set to  0.000000
2/7/2011	6:44:16 PM	H2 MFC set to  0.000000
2/7/2011	6:44:16 PM	BCl3 MFC set to  0.000000
2/7/2011	6:44:16 PM	PHl3 MFC set to  0.000000
2/7/2011	6:44:16 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:44:16 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:44:16 PM	Tube furnace set to 0
2/7/2011	6:45:16 PM	H2 valve closed
2/7/2011	6:45:16 PM	BCl3 valve closed
2/7/2011	6:45:16 PM	PH3 valve closed
2/7/2011	6:45:16 PM	SiCl4 pre valve closed
2/7/2011	6:45:16 PM	SiCl4 post valve closed
2/7/2011	6:45:16 PM	Bubbler valve closed
2/7/2011	6:45:16 PM	Helium valve opened
2/7/2011	6:45:16 PM	Main Vac valve opened
2/7/2011	6:45:16 PM	Bypass valve opened
2/7/2011	6:45:16 PM	Helium MFC set to  100.000000
2/7/2011	6:45:16 PM	H2 MFC set to  0.000000
2/7/2011	6:45:16 PM	BCl3 MFC set to  0.000000
2/7/2011	6:45:16 PM	PHl3 MFC set to  0.000000
2/7/2011	6:45:16 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:45:16 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:45:16 PM	Tube furnace set to 0
2/7/2011	6:46:16 PM	Helium valve closed
2/7/2011	6:46:16 PM	H2 valve closed
2/7/2011	6:46:16 PM	BCl3 valve closed
2/7/2011	6:46:16 PM	PH3 valve closed
2/7/2011	6:46:16 PM	SiCl4 pre valve closed
2/7/2011	6:46:16 PM	SiCl4 post valve closed
2/7/2011	6:46:16 PM	Bubbler valve closed
2/7/2011	6:46:16 PM	Main Vac valve opened
2/7/2011	6:46:16 PM	Bypass valve opened
2/7/2011	6:46:16 PM	Helium MFC set to  0.000000
2/7/2011	6:46:16 PM	H2 MFC set to  0.000000
2/7/2011	6:46:16 PM	BCl3 MFC set to  0.000000
2/7/2011	6:46:16 PM	PHl3 MFC set to  0.000000
2/7/2011	6:46:16 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:46:16 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:46:17 PM	Tube furnace set to 0
2/7/2011	6:47:17 PM	H2 valve closed
2/7/2011	6:47:17 PM	BCl3 valve closed
2/7/2011	6:47:17 PM	PH3 valve closed
2/7/2011	6:47:17 PM	SiCl4 pre valve closed
2/7/2011	6:47:17 PM	SiCl4 post valve closed
2/7/2011	6:47:17 PM	Bubbler valve closed
2/7/2011	6:47:17 PM	Helium valve opened
2/7/2011	6:47:17 PM	Main Vac valve opened
2/7/2011	6:47:17 PM	Bypass valve opened
2/7/2011	6:47:17 PM	Helium MFC set to  100.000000
2/7/2011	6:47:17 PM	H2 MFC set to  0.000000
2/7/2011	6:47:17 PM	BCl3 MFC set to  0.000000
2/7/2011	6:47:17 PM	PHl3 MFC set to  0.000000
2/7/2011	6:47:17 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:47:17 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:47:17 PM	Tube furnace set to 0
2/7/2011	6:48:17 PM	Helium valve closed
2/7/2011	6:48:17 PM	H2 valve closed
2/7/2011	6:48:17 PM	BCl3 valve closed
2/7/2011	6:48:17 PM	PH3 valve closed
2/7/2011	6:48:17 PM	SiCl4 pre valve closed
2/7/2011	6:48:17 PM	SiCl4 post valve closed
2/7/2011	6:48:17 PM	Bubbler valve closed
2/7/2011	6:48:17 PM	Main Vac valve opened
2/7/2011	6:48:17 PM	Bypass valve opened
2/7/2011	6:48:17 PM	Helium MFC set to  0.000000
2/7/2011	6:48:17 PM	H2 MFC set to  0.000000
2/7/2011	6:48:17 PM	BCl3 MFC set to  0.000000
2/7/2011	6:48:17 PM	PHl3 MFC set to  0.000000
2/7/2011	6:48:17 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:48:17 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:48:17 PM	Tube furnace set to 0
2/7/2011	6:49:17 PM	H2 valve closed
2/7/2011	6:49:17 PM	BCl3 valve closed
2/7/2011	6:49:17 PM	PH3 valve closed
2/7/2011	6:49:17 PM	SiCl4 pre valve closed
2/7/2011	6:49:17 PM	SiCl4 post valve closed
2/7/2011	6:49:17 PM	Bubbler valve closed
2/7/2011	6:49:17 PM	Helium valve opened
2/7/2011	6:49:17 PM	Main Vac valve opened
2/7/2011	6:49:17 PM	Bypass valve opened
2/7/2011	6:49:17 PM	Helium MFC set to  100.000000
2/7/2011	6:49:17 PM	H2 MFC set to  0.000000
2/7/2011	6:49:17 PM	BCl3 MFC set to  0.000000
2/7/2011	6:49:17 PM	PHl3 MFC set to  0.000000
2/7/2011	6:49:17 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:49:17 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:49:17 PM	Tube furnace set to 0
2/7/2011	6:50:17 PM	Helium valve closed
2/7/2011	6:50:17 PM	H2 valve closed
2/7/2011	6:50:17 PM	BCl3 valve closed
2/7/2011	6:50:17 PM	PH3 valve closed
2/7/2011	6:50:17 PM	SiCl4 pre valve closed
2/7/2011	6:50:17 PM	SiCl4 post valve closed
2/7/2011	6:50:17 PM	Bubbler valve closed
2/7/2011	6:50:17 PM	Main Vac valve opened
2/7/2011	6:50:17 PM	Bypass valve opened
2/7/2011	6:50:17 PM	Helium MFC set to  0.000000
2/7/2011	6:50:17 PM	H2 MFC set to  0.000000
2/7/2011	6:50:17 PM	BCl3 MFC set to  0.000000
2/7/2011	6:50:17 PM	PHl3 MFC set to  0.000000
2/7/2011	6:50:17 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:50:17 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:50:17 PM	Tube furnace set to 0
2/7/2011	6:51:17 PM	H2 valve closed
2/7/2011	6:51:17 PM	BCl3 valve closed
2/7/2011	6:51:17 PM	PH3 valve closed
2/7/2011	6:51:17 PM	SiCl4 pre valve closed
2/7/2011	6:51:17 PM	SiCl4 post valve closed
2/7/2011	6:51:17 PM	Bubbler valve closed
2/7/2011	6:51:17 PM	Helium valve opened
2/7/2011	6:51:17 PM	Main Vac valve opened
2/7/2011	6:51:17 PM	Bypass valve opened
2/7/2011	6:51:17 PM	Helium MFC set to  100.000000
2/7/2011	6:51:17 PM	H2 MFC set to  0.000000
2/7/2011	6:51:17 PM	BCl3 MFC set to  0.000000
2/7/2011	6:51:17 PM	PHl3 MFC set to  0.000000
2/7/2011	6:51:17 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:51:17 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:51:18 PM	Tube furnace set to 0
2/7/2011	6:52:18 PM	Helium valve closed
2/7/2011	6:52:18 PM	H2 valve closed
2/7/2011	6:52:18 PM	BCl3 valve closed
2/7/2011	6:52:18 PM	PH3 valve closed
2/7/2011	6:52:18 PM	SiCl4 pre valve closed
2/7/2011	6:52:18 PM	SiCl4 post valve closed
2/7/2011	6:52:18 PM	Bubbler valve closed
2/7/2011	6:52:18 PM	Main Vac valve opened
2/7/2011	6:52:18 PM	Bypass valve opened
2/7/2011	6:52:18 PM	Helium MFC set to  0.000000
2/7/2011	6:52:18 PM	H2 MFC set to  0.000000
2/7/2011	6:52:18 PM	BCl3 MFC set to  0.000000
2/7/2011	6:52:18 PM	PHl3 MFC set to  0.000000
2/7/2011	6:52:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:52:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:52:18 PM	Tube furnace set to 0
2/7/2011	6:53:18 PM	H2 valve closed
2/7/2011	6:53:18 PM	BCl3 valve closed
2/7/2011	6:53:18 PM	PH3 valve closed
2/7/2011	6:53:18 PM	SiCl4 pre valve closed
2/7/2011	6:53:18 PM	SiCl4 post valve closed
2/7/2011	6:53:18 PM	Bubbler valve closed
2/7/2011	6:53:18 PM	Helium valve opened
2/7/2011	6:53:18 PM	Main Vac valve opened
2/7/2011	6:53:18 PM	Bypass valve opened
2/7/2011	6:53:18 PM	Helium MFC set to  100.000000
2/7/2011	6:53:18 PM	H2 MFC set to  0.000000
2/7/2011	6:53:18 PM	BCl3 MFC set to  0.000000
2/7/2011	6:53:18 PM	PHl3 MFC set to  0.000000
2/7/2011	6:53:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:53:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:53:18 PM	Tube furnace set to 0
2/7/2011	6:54:18 PM	Helium valve closed
2/7/2011	6:54:18 PM	H2 valve closed
2/7/2011	6:54:18 PM	BCl3 valve closed
2/7/2011	6:54:18 PM	PH3 valve closed
2/7/2011	6:54:18 PM	SiCl4 pre valve closed
2/7/2011	6:54:18 PM	SiCl4 post valve closed
2/7/2011	6:54:18 PM	Bubbler valve closed
2/7/2011	6:54:18 PM	Main Vac valve opened
2/7/2011	6:54:18 PM	Bypass valve opened
2/7/2011	6:54:18 PM	Helium MFC set to  0.000000
2/7/2011	6:54:18 PM	H2 MFC set to  0.000000
2/7/2011	6:54:18 PM	BCl3 MFC set to  0.000000
2/7/2011	6:54:18 PM	PHl3 MFC set to  0.000000
2/7/2011	6:54:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:54:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:54:18 PM	Tube furnace set to 0
2/7/2011	6:55:18 PM	H2 valve closed
2/7/2011	6:55:18 PM	BCl3 valve closed
2/7/2011	6:55:18 PM	PH3 valve closed
2/7/2011	6:55:18 PM	SiCl4 pre valve closed
2/7/2011	6:55:18 PM	SiCl4 post valve closed
2/7/2011	6:55:18 PM	Bubbler valve closed
2/7/2011	6:55:18 PM	Helium valve opened
2/7/2011	6:55:18 PM	Main Vac valve opened
2/7/2011	6:55:18 PM	Bypass valve opened
2/7/2011	6:55:18 PM	Helium MFC set to  100.000000
2/7/2011	6:55:18 PM	H2 MFC set to  0.000000
2/7/2011	6:55:18 PM	BCl3 MFC set to  0.000000
2/7/2011	6:55:18 PM	PHl3 MFC set to  0.000000
2/7/2011	6:55:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:55:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:55:18 PM	Tube furnace set to 0
2/7/2011	6:56:18 PM	Helium valve closed
2/7/2011	6:56:18 PM	H2 valve closed
2/7/2011	6:56:18 PM	BCl3 valve closed
2/7/2011	6:56:18 PM	PH3 valve closed
2/7/2011	6:56:18 PM	SiCl4 pre valve closed
2/7/2011	6:56:18 PM	SiCl4 post valve closed
2/7/2011	6:56:18 PM	Bubbler valve closed
2/7/2011	6:56:18 PM	Main Vac valve opened
2/7/2011	6:56:18 PM	Bypass valve opened
2/7/2011	6:56:18 PM	Helium MFC set to  0.000000
2/7/2011	6:56:18 PM	H2 MFC set to  0.000000
2/7/2011	6:56:18 PM	BCl3 MFC set to  0.000000
2/7/2011	6:56:18 PM	PHl3 MFC set to  0.000000
2/7/2011	6:56:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:56:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:56:19 PM	Tube furnace set to 0
2/7/2011	6:57:19 PM	H2 valve closed
2/7/2011	6:57:19 PM	BCl3 valve closed
2/7/2011	6:57:19 PM	PH3 valve closed
2/7/2011	6:57:19 PM	SiCl4 pre valve closed
2/7/2011	6:57:19 PM	SiCl4 post valve closed
2/7/2011	6:57:19 PM	Bubbler valve closed
2/7/2011	6:57:19 PM	Helium valve opened
2/7/2011	6:57:19 PM	Main Vac valve opened
2/7/2011	6:57:19 PM	Bypass valve opened
2/7/2011	6:57:19 PM	Helium MFC set to  100.000000
2/7/2011	6:57:19 PM	H2 MFC set to  0.000000
2/7/2011	6:57:19 PM	BCl3 MFC set to  0.000000
2/7/2011	6:57:19 PM	PHl3 MFC set to  0.000000
2/7/2011	6:57:19 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:57:19 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:57:19 PM	Tube furnace set to 0
2/7/2011	6:58:19 PM	Helium valve closed
2/7/2011	6:58:19 PM	H2 valve closed
2/7/2011	6:58:19 PM	BCl3 valve closed
2/7/2011	6:58:19 PM	PH3 valve closed
2/7/2011	6:58:19 PM	SiCl4 pre valve closed
2/7/2011	6:58:19 PM	SiCl4 post valve closed
2/7/2011	6:58:19 PM	Bubbler valve closed
2/7/2011	6:58:19 PM	Main Vac valve opened
2/7/2011	6:58:19 PM	Bypass valve opened
2/7/2011	6:58:19 PM	Helium MFC set to  0.000000
2/7/2011	6:58:19 PM	H2 MFC set to  0.000000
2/7/2011	6:58:19 PM	BCl3 MFC set to  0.000000
2/7/2011	6:58:19 PM	PHl3 MFC set to  0.000000
2/7/2011	6:58:19 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:58:19 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:58:19 PM	Tube furnace set to 0
2/7/2011	6:59:19 PM	H2 valve closed
2/7/2011	6:59:19 PM	BCl3 valve closed
2/7/2011	6:59:19 PM	PH3 valve closed
2/7/2011	6:59:19 PM	SiCl4 pre valve closed
2/7/2011	6:59:19 PM	SiCl4 post valve closed
2/7/2011	6:59:19 PM	Bubbler valve closed
2/7/2011	6:59:19 PM	Helium valve opened
2/7/2011	6:59:19 PM	Main Vac valve opened
2/7/2011	6:59:19 PM	Bypass valve opened
2/7/2011	6:59:19 PM	Helium MFC set to  100.000000
2/7/2011	6:59:19 PM	H2 MFC set to  0.000000
2/7/2011	6:59:19 PM	BCl3 MFC set to  0.000000
2/7/2011	6:59:19 PM	PHl3 MFC set to  0.000000
2/7/2011	6:59:19 PM	SiCl4 MFC set to  0.000000
2/7/2011	6:59:19 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	6:59:19 PM	Tube furnace set to 0
2/7/2011	7:00:19 PM	Helium valve closed
2/7/2011	7:00:19 PM	H2 valve closed
2/7/2011	7:00:19 PM	BCl3 valve closed
2/7/2011	7:00:19 PM	PH3 valve closed
2/7/2011	7:00:19 PM	SiCl4 pre valve closed
2/7/2011	7:00:19 PM	SiCl4 post valve closed
2/7/2011	7:00:19 PM	Bubbler valve closed
2/7/2011	7:00:19 PM	Main Vac valve opened
2/7/2011	7:00:19 PM	Bypass valve opened
2/7/2011	7:00:19 PM	Helium MFC set to  0.000000
2/7/2011	7:00:19 PM	H2 MFC set to  0.000000
2/7/2011	7:00:19 PM	BCl3 MFC set to  0.000000
2/7/2011	7:00:19 PM	PHl3 MFC set to  0.000000
2/7/2011	7:00:19 PM	SiCl4 MFC set to  0.000000
2/7/2011	7:00:19 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	7:00:19 PM	Tube furnace set to 0
2/7/2011	7:01:19 PM	H2 valve closed
2/7/2011	7:01:19 PM	BCl3 valve closed
2/7/2011	7:01:19 PM	PH3 valve closed
2/7/2011	7:01:19 PM	SiCl4 pre valve closed
2/7/2011	7:01:19 PM	SiCl4 post valve closed
2/7/2011	7:01:19 PM	Bubbler valve closed
2/7/2011	7:01:19 PM	Helium valve opened
2/7/2011	7:01:19 PM	Main Vac valve opened
2/7/2011	7:01:19 PM	Bypass valve opened
2/7/2011	7:01:19 PM	Helium MFC set to  100.000000
2/7/2011	7:01:19 PM	H2 MFC set to  0.000000
2/7/2011	7:01:19 PM	BCl3 MFC set to  0.000000
2/7/2011	7:01:19 PM	PHl3 MFC set to  0.000000
2/7/2011	7:01:19 PM	SiCl4 MFC set to  0.000000
2/7/2011	7:01:19 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	7:01:19 PM	Tube furnace set to 0
2/7/2011	7:02:20 PM	Helium valve closed
2/7/2011	7:02:20 PM	H2 valve closed
2/7/2011	7:02:20 PM	BCl3 valve closed
2/7/2011	7:02:20 PM	PH3 valve closed
2/7/2011	7:02:20 PM	SiCl4 pre valve closed
2/7/2011	7:02:20 PM	SiCl4 post valve closed
2/7/2011	7:02:20 PM	Bubbler valve closed
2/7/2011	7:02:20 PM	Main Vac valve opened
2/7/2011	7:02:20 PM	Bypass valve opened
2/7/2011	7:02:20 PM	Helium MFC set to  0.000000
2/7/2011	7:02:20 PM	H2 MFC set to  0.000000
2/7/2011	7:02:20 PM	BCl3 MFC set to  0.000000
2/7/2011	7:02:20 PM	PHl3 MFC set to  0.000000
2/7/2011	7:02:20 PM	SiCl4 MFC set to  0.000000
2/7/2011	7:02:20 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	7:02:20 PM	Tube furnace set to 0
2/7/2011	7:02:21 PM	Run finished at 7:02 PM
2/7/2011	7:02:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/7/2011	8:08:22 PM	Recipe started at 8:08 PM
2/7/2011	8:08:22 PM	Helium valve closed
2/7/2011	8:08:22 PM	BCl3 valve closed
2/7/2011	8:08:22 PM	PH3 valve closed
2/7/2011	8:08:22 PM	SiCl4 pre valve closed
2/7/2011	8:08:22 PM	SiCl4 post valve closed
2/7/2011	8:08:22 PM	Main Vac valve closed
2/7/2011	8:08:22 PM	Bypass valve closed
2/7/2011	8:08:22 PM	Bubbler valve closed
2/7/2011	8:08:22 PM	H2 valve opened
2/7/2011	8:08:22 PM	Helium MFC set to  0.000000
2/7/2011	8:08:22 PM	H2 MFC set to  500.000000
2/7/2011	8:08:22 PM	BCl3 MFC set to  0.000000
2/7/2011	8:08:22 PM	PHl3 MFC set to  0.000000
2/7/2011	8:08:22 PM	SiCl4 MFC set to  0.000000
2/7/2011	8:08:22 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	8:08:23 PM	Tube furnace set to 0
2/7/2011	8:09:43 PM	Helium valve closed
2/7/2011	8:09:43 PM	BCl3 valve closed
2/7/2011	8:09:43 PM	PH3 valve closed
2/7/2011	8:09:43 PM	SiCl4 pre valve closed
2/7/2011	8:09:43 PM	SiCl4 post valve closed
2/7/2011	8:09:43 PM	Main Vac valve closed
2/7/2011	8:09:43 PM	Bypass valve closed
2/7/2011	8:09:43 PM	H2 valve opened
2/7/2011	8:09:43 PM	Bubbler valve opened
2/7/2011	8:09:43 PM	Helium MFC set to  0.000000
2/7/2011	8:09:43 PM	H2 MFC set to  500.000000
2/7/2011	8:09:43 PM	BCl3 MFC set to  0.000000
2/7/2011	8:09:43 PM	PHl3 MFC set to  0.000000
2/7/2011	8:09:43 PM	SiCl4 MFC set to  0.000000
2/7/2011	8:09:43 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	8:09:44 PM	Tube furnace set to 1000
2/7/2011	8:29:44 PM	Helium valve closed
2/7/2011	8:29:44 PM	PH3 valve closed
2/7/2011	8:29:44 PM	Main Vac valve closed
2/7/2011	8:29:44 PM	Bypass valve closed
2/7/2011	8:29:44 PM	H2 valve opened
2/7/2011	8:29:44 PM	BCl3 valve opened
2/7/2011	8:29:44 PM	SiCl4 pre valve opened
2/7/2011	8:29:44 PM	SiCl4 post valve opened
2/7/2011	8:29:44 PM	Bubbler valve opened
2/7/2011	8:29:44 PM	Helium MFC set to  0.000000
2/7/2011	8:29:44 PM	H2 MFC set to  500.000000
2/7/2011	8:29:44 PM	BCl3 MFC set to  3.000000
2/7/2011	8:29:44 PM	PHl3 MFC set to  0.000000
2/7/2011	8:29:44 PM	SiCl4 MFC set to  35.000000
2/7/2011	8:29:44 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	8:29:44 PM	Tube furnace set to 1000
2/7/2011	8:44:44 PM	H2 valve closed
2/7/2011	8:44:44 PM	BCl3 valve closed
2/7/2011	8:44:44 PM	PH3 valve closed
2/7/2011	8:44:44 PM	SiCl4 pre valve closed
2/7/2011	8:44:44 PM	SiCl4 post valve closed
2/7/2011	8:44:44 PM	Main Vac valve closed
2/7/2011	8:44:44 PM	Bypass valve closed
2/7/2011	8:44:44 PM	Helium valve opened
2/7/2011	8:44:44 PM	Bubbler valve opened
2/7/2011	8:44:44 PM	Helium MFC set to  500.000000
2/7/2011	8:44:44 PM	H2 MFC set to  0.000000
2/7/2011	8:44:44 PM	BCl3 MFC set to  0.000000
2/7/2011	8:44:44 PM	PHl3 MFC set to  0.000000
2/7/2011	8:44:44 PM	SiCl4 MFC set to  0.000000
2/7/2011	8:44:44 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	8:44:44 PM	Tube furnace set to 0
2/7/2011	9:04:44 PM	Helium valve closed
2/7/2011	9:04:44 PM	H2 valve closed
2/7/2011	9:04:44 PM	BCl3 valve closed
2/7/2011	9:04:44 PM	PH3 valve closed
2/7/2011	9:04:44 PM	SiCl4 pre valve closed
2/7/2011	9:04:44 PM	SiCl4 post valve closed
2/7/2011	9:04:44 PM	Main Vac valve closed
2/7/2011	9:04:44 PM	Bypass valve closed
2/7/2011	9:04:44 PM	Bubbler valve closed
2/7/2011	9:04:44 PM	Helium MFC set to  0.000000
2/7/2011	9:04:44 PM	H2 MFC set to  0.000000
2/7/2011	9:04:44 PM	BCl3 MFC set to  0.000000
2/7/2011	9:04:44 PM	PHl3 MFC set to  0.000000
2/7/2011	9:04:44 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:04:44 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:04:44 PM	Tube furnace set to 0
2/7/2011	9:04:44 PM	Run finished at 9:04 PM
2/7/2011	9:10:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	9:10:07 PM	Recipe started at 9:10 PM
2/7/2011	9:10:07 PM	H2 valve closed
2/7/2011	9:10:07 PM	BCl3 valve closed
2/7/2011	9:10:07 PM	PH3 valve closed
2/7/2011	9:10:07 PM	SiCl4 pre valve closed
2/7/2011	9:10:07 PM	SiCl4 post valve closed
2/7/2011	9:10:07 PM	Main Vac valve closed
2/7/2011	9:10:07 PM	Bypass valve closed
2/7/2011	9:10:07 PM	Bubbler valve closed
2/7/2011	9:10:07 PM	Helium valve opened
2/7/2011	9:10:07 PM	Helium MFC set to  500.000000
2/7/2011	9:10:07 PM	H2 MFC set to  0.000000
2/7/2011	9:10:07 PM	BCl3 MFC set to  0.000000
2/7/2011	9:10:07 PM	PHl3 MFC set to  0.000000
2/7/2011	9:10:07 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:10:07 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:10:07 PM	Tube furnace set to 0
2/7/2011	9:10:11 PM	Helium valve closed
2/7/2011	9:10:11 PM	H2 valve closed
2/7/2011	9:10:11 PM	BCl3 valve closed
2/7/2011	9:10:11 PM	PH3 valve closed
2/7/2011	9:10:11 PM	SiCl4 pre valve closed
2/7/2011	9:10:11 PM	SiCl4 post valve closed
2/7/2011	9:10:11 PM	Main Vac valve closed
2/7/2011	9:10:11 PM	Bypass valve closed
2/7/2011	9:10:11 PM	Bubbler valve closed
2/7/2011	9:10:11 PM	Helium MFC set to  0.000000
2/7/2011	9:10:11 PM	H2 MFC set to  0.000000
2/7/2011	9:10:11 PM	BCl3 MFC set to  0.000000
2/7/2011	9:10:11 PM	PHl3 MFC set to  0.000000
2/7/2011	9:10:11 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:10:11 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:10:11 PM	Tube furnace set to 0
2/7/2011	9:10:11 PM	Run finished at 9:10 PM
2/7/2011	9:10:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2011	9:16:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	9:16:11 PM	Recipe started at 9:16 PM
2/7/2011	9:16:11 PM	Helium valve closed
2/7/2011	9:16:11 PM	H2 valve closed
2/7/2011	9:16:11 PM	BCl3 valve closed
2/7/2011	9:16:11 PM	PH3 valve closed
2/7/2011	9:16:11 PM	SiCl4 pre valve closed
2/7/2011	9:16:11 PM	SiCl4 post valve closed
2/7/2011	9:16:11 PM	Main Vac valve closed
2/7/2011	9:16:11 PM	Bubbler valve closed
2/7/2011	9:16:11 PM	Bypass valve opened
2/7/2011	9:16:11 PM	Helium MFC set to  0.000000
2/7/2011	9:16:11 PM	H2 MFC set to  0.000000
2/7/2011	9:16:11 PM	BCl3 MFC set to  0.000000
2/7/2011	9:16:11 PM	PHl3 MFC set to  0.000000
2/7/2011	9:16:11 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:16:11 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:16:11 PM	Tube furnace set to 0
2/7/2011	9:16:43 PM	Helium valve closed
2/7/2011	9:16:43 PM	H2 valve closed
2/7/2011	9:16:43 PM	BCl3 valve closed
2/7/2011	9:16:43 PM	PH3 valve closed
2/7/2011	9:16:43 PM	SiCl4 pre valve closed
2/7/2011	9:16:43 PM	SiCl4 post valve closed
2/7/2011	9:16:43 PM	Bubbler valve closed
2/7/2011	9:16:43 PM	Main Vac valve opened
2/7/2011	9:16:43 PM	Bypass valve opened
2/7/2011	9:16:43 PM	Helium MFC set to  0.000000
2/7/2011	9:16:43 PM	H2 MFC set to  0.000000
2/7/2011	9:16:43 PM	BCl3 MFC set to  0.000000
2/7/2011	9:16:43 PM	PHl3 MFC set to  0.000000
2/7/2011	9:16:43 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:16:43 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:16:43 PM	Tube furnace set to 0
2/7/2011	9:16:43 PM	Run finished at 9:16 PM
2/7/2011	9:16:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	9:25:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/7/2011	9:25:47 PM	Recipe started at 9:25 PM
2/7/2011	9:25:47 PM	Helium valve closed
2/7/2011	9:25:47 PM	H2 valve closed
2/7/2011	9:25:47 PM	BCl3 valve closed
2/7/2011	9:25:47 PM	PH3 valve closed
2/7/2011	9:25:47 PM	SiCl4 pre valve closed
2/7/2011	9:25:47 PM	SiCl4 post valve closed
2/7/2011	9:25:47 PM	Main Vac valve closed
2/7/2011	9:25:47 PM	Bubbler valve closed
2/7/2011	9:25:47 PM	Bypass valve opened
2/7/2011	9:25:47 PM	Helium MFC set to  0.000000
2/7/2011	9:25:47 PM	H2 MFC set to  0.000000
2/7/2011	9:25:47 PM	BCl3 MFC set to  0.000000
2/7/2011	9:25:47 PM	PHl3 MFC set to  0.000000
2/7/2011	9:25:47 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:25:47 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:25:48 PM	Tube furnace set to 0
2/7/2011	9:25:48 PM	Helium valve closed
2/7/2011	9:25:48 PM	H2 valve closed
2/7/2011	9:25:48 PM	BCl3 valve closed
2/7/2011	9:25:48 PM	PH3 valve closed
2/7/2011	9:25:48 PM	SiCl4 pre valve closed
2/7/2011	9:25:48 PM	SiCl4 post valve closed
2/7/2011	9:25:48 PM	Bubbler valve closed
2/7/2011	9:25:48 PM	Main Vac valve opened
2/7/2011	9:25:48 PM	Bypass valve opened
2/7/2011	9:25:48 PM	Helium MFC set to  0.000000
2/7/2011	9:25:48 PM	H2 MFC set to  0.000000
2/7/2011	9:25:48 PM	BCl3 MFC set to  0.000000
2/7/2011	9:25:48 PM	PHl3 MFC set to  0.000000
2/7/2011	9:25:48 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:25:48 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:25:48 PM	Tube furnace set to 0
2/7/2011	9:26:48 PM	H2 valve closed
2/7/2011	9:26:48 PM	BCl3 valve closed
2/7/2011	9:26:48 PM	PH3 valve closed
2/7/2011	9:26:48 PM	SiCl4 pre valve closed
2/7/2011	9:26:48 PM	SiCl4 post valve closed
2/7/2011	9:26:48 PM	Bubbler valve closed
2/7/2011	9:26:48 PM	Helium valve opened
2/7/2011	9:26:48 PM	Main Vac valve opened
2/7/2011	9:26:48 PM	Bypass valve opened
2/7/2011	9:26:48 PM	Helium MFC set to  100.000000
2/7/2011	9:26:48 PM	H2 MFC set to  0.000000
2/7/2011	9:26:48 PM	BCl3 MFC set to  0.000000
2/7/2011	9:26:48 PM	PHl3 MFC set to  0.000000
2/7/2011	9:26:48 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:26:48 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:26:48 PM	Tube furnace set to 0
2/7/2011	9:27:48 PM	Helium valve closed
2/7/2011	9:27:48 PM	H2 valve closed
2/7/2011	9:27:48 PM	BCl3 valve closed
2/7/2011	9:27:48 PM	PH3 valve closed
2/7/2011	9:27:48 PM	SiCl4 pre valve closed
2/7/2011	9:27:48 PM	SiCl4 post valve closed
2/7/2011	9:27:48 PM	Bubbler valve closed
2/7/2011	9:27:48 PM	Main Vac valve opened
2/7/2011	9:27:48 PM	Bypass valve opened
2/7/2011	9:27:48 PM	Helium MFC set to  0.000000
2/7/2011	9:27:48 PM	H2 MFC set to  0.000000
2/7/2011	9:27:48 PM	BCl3 MFC set to  0.000000
2/7/2011	9:27:48 PM	PHl3 MFC set to  0.000000
2/7/2011	9:27:48 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:27:48 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:27:48 PM	Tube furnace set to 0
2/7/2011	9:28:48 PM	H2 valve closed
2/7/2011	9:28:48 PM	BCl3 valve closed
2/7/2011	9:28:48 PM	PH3 valve closed
2/7/2011	9:28:48 PM	SiCl4 pre valve closed
2/7/2011	9:28:48 PM	SiCl4 post valve closed
2/7/2011	9:28:48 PM	Bubbler valve closed
2/7/2011	9:28:48 PM	Helium valve opened
2/7/2011	9:28:48 PM	Main Vac valve opened
2/7/2011	9:28:48 PM	Bypass valve opened
2/7/2011	9:28:48 PM	Helium MFC set to  100.000000
2/7/2011	9:28:48 PM	H2 MFC set to  0.000000
2/7/2011	9:28:48 PM	BCl3 MFC set to  0.000000
2/7/2011	9:28:48 PM	PHl3 MFC set to  0.000000
2/7/2011	9:28:48 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:28:48 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:28:49 PM	Tube furnace set to 0
2/7/2011	9:29:49 PM	Helium valve closed
2/7/2011	9:29:49 PM	H2 valve closed
2/7/2011	9:29:49 PM	BCl3 valve closed
2/7/2011	9:29:49 PM	PH3 valve closed
2/7/2011	9:29:49 PM	SiCl4 pre valve closed
2/7/2011	9:29:49 PM	SiCl4 post valve closed
2/7/2011	9:29:49 PM	Bubbler valve closed
2/7/2011	9:29:49 PM	Main Vac valve opened
2/7/2011	9:29:49 PM	Bypass valve opened
2/7/2011	9:29:49 PM	Helium MFC set to  0.000000
2/7/2011	9:29:49 PM	H2 MFC set to  0.000000
2/7/2011	9:29:49 PM	BCl3 MFC set to  0.000000
2/7/2011	9:29:49 PM	PHl3 MFC set to  0.000000
2/7/2011	9:29:49 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:29:49 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:29:49 PM	Tube furnace set to 0
2/7/2011	9:30:49 PM	H2 valve closed
2/7/2011	9:30:49 PM	BCl3 valve closed
2/7/2011	9:30:49 PM	PH3 valve closed
2/7/2011	9:30:49 PM	SiCl4 pre valve closed
2/7/2011	9:30:49 PM	SiCl4 post valve closed
2/7/2011	9:30:49 PM	Bubbler valve closed
2/7/2011	9:30:49 PM	Helium valve opened
2/7/2011	9:30:49 PM	Main Vac valve opened
2/7/2011	9:30:49 PM	Bypass valve opened
2/7/2011	9:30:49 PM	Helium MFC set to  100.000000
2/7/2011	9:30:49 PM	H2 MFC set to  0.000000
2/7/2011	9:30:49 PM	BCl3 MFC set to  0.000000
2/7/2011	9:30:49 PM	PHl3 MFC set to  0.000000
2/7/2011	9:30:49 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:30:49 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:30:49 PM	Tube furnace set to 0
2/7/2011	9:31:49 PM	Helium valve closed
2/7/2011	9:31:49 PM	H2 valve closed
2/7/2011	9:31:49 PM	BCl3 valve closed
2/7/2011	9:31:49 PM	PH3 valve closed
2/7/2011	9:31:49 PM	SiCl4 pre valve closed
2/7/2011	9:31:49 PM	SiCl4 post valve closed
2/7/2011	9:31:49 PM	Bubbler valve closed
2/7/2011	9:31:49 PM	Main Vac valve opened
2/7/2011	9:31:49 PM	Bypass valve opened
2/7/2011	9:31:49 PM	Helium MFC set to  0.000000
2/7/2011	9:31:49 PM	H2 MFC set to  0.000000
2/7/2011	9:31:49 PM	BCl3 MFC set to  0.000000
2/7/2011	9:31:49 PM	PHl3 MFC set to  0.000000
2/7/2011	9:31:49 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:31:49 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:31:49 PM	Tube furnace set to 0
2/7/2011	9:32:49 PM	H2 valve closed
2/7/2011	9:32:49 PM	BCl3 valve closed
2/7/2011	9:32:49 PM	PH3 valve closed
2/7/2011	9:32:49 PM	SiCl4 pre valve closed
2/7/2011	9:32:49 PM	SiCl4 post valve closed
2/7/2011	9:32:49 PM	Bubbler valve closed
2/7/2011	9:32:49 PM	Helium valve opened
2/7/2011	9:32:49 PM	Main Vac valve opened
2/7/2011	9:32:49 PM	Bypass valve opened
2/7/2011	9:32:49 PM	Helium MFC set to  100.000000
2/7/2011	9:32:49 PM	H2 MFC set to  0.000000
2/7/2011	9:32:49 PM	BCl3 MFC set to  0.000000
2/7/2011	9:32:49 PM	PHl3 MFC set to  0.000000
2/7/2011	9:32:49 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:32:49 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:32:49 PM	Tube furnace set to 0
2/7/2011	9:33:49 PM	Helium valve closed
2/7/2011	9:33:49 PM	H2 valve closed
2/7/2011	9:33:49 PM	BCl3 valve closed
2/7/2011	9:33:49 PM	PH3 valve closed
2/7/2011	9:33:49 PM	SiCl4 pre valve closed
2/7/2011	9:33:49 PM	SiCl4 post valve closed
2/7/2011	9:33:49 PM	Bubbler valve closed
2/7/2011	9:33:49 PM	Main Vac valve opened
2/7/2011	9:33:49 PM	Bypass valve opened
2/7/2011	9:33:49 PM	Helium MFC set to  0.000000
2/7/2011	9:33:49 PM	H2 MFC set to  0.000000
2/7/2011	9:33:49 PM	BCl3 MFC set to  0.000000
2/7/2011	9:33:49 PM	PHl3 MFC set to  0.000000
2/7/2011	9:33:49 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:33:49 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:33:50 PM	Tube furnace set to 0
2/7/2011	9:34:50 PM	H2 valve closed
2/7/2011	9:34:50 PM	BCl3 valve closed
2/7/2011	9:34:50 PM	PH3 valve closed
2/7/2011	9:34:50 PM	SiCl4 pre valve closed
2/7/2011	9:34:50 PM	SiCl4 post valve closed
2/7/2011	9:34:50 PM	Bubbler valve closed
2/7/2011	9:34:50 PM	Helium valve opened
2/7/2011	9:34:50 PM	Main Vac valve opened
2/7/2011	9:34:50 PM	Bypass valve opened
2/7/2011	9:34:50 PM	Helium MFC set to  100.000000
2/7/2011	9:34:50 PM	H2 MFC set to  0.000000
2/7/2011	9:34:50 PM	BCl3 MFC set to  0.000000
2/7/2011	9:34:50 PM	PHl3 MFC set to  0.000000
2/7/2011	9:34:50 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:34:50 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:34:50 PM	Tube furnace set to 0
2/7/2011	9:35:50 PM	Helium valve closed
2/7/2011	9:35:50 PM	H2 valve closed
2/7/2011	9:35:50 PM	BCl3 valve closed
2/7/2011	9:35:50 PM	PH3 valve closed
2/7/2011	9:35:50 PM	SiCl4 pre valve closed
2/7/2011	9:35:50 PM	SiCl4 post valve closed
2/7/2011	9:35:50 PM	Bubbler valve closed
2/7/2011	9:35:50 PM	Main Vac valve opened
2/7/2011	9:35:50 PM	Bypass valve opened
2/7/2011	9:35:50 PM	Helium MFC set to  0.000000
2/7/2011	9:35:50 PM	H2 MFC set to  0.000000
2/7/2011	9:35:50 PM	BCl3 MFC set to  0.000000
2/7/2011	9:35:50 PM	PHl3 MFC set to  0.000000
2/7/2011	9:35:50 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:35:50 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:35:50 PM	Tube furnace set to 0
2/7/2011	9:36:50 PM	H2 valve closed
2/7/2011	9:36:50 PM	BCl3 valve closed
2/7/2011	9:36:50 PM	PH3 valve closed
2/7/2011	9:36:50 PM	SiCl4 pre valve closed
2/7/2011	9:36:50 PM	SiCl4 post valve closed
2/7/2011	9:36:50 PM	Bubbler valve closed
2/7/2011	9:36:50 PM	Helium valve opened
2/7/2011	9:36:50 PM	Main Vac valve opened
2/7/2011	9:36:50 PM	Bypass valve opened
2/7/2011	9:36:50 PM	Helium MFC set to  100.000000
2/7/2011	9:36:50 PM	H2 MFC set to  0.000000
2/7/2011	9:36:50 PM	BCl3 MFC set to  0.000000
2/7/2011	9:36:50 PM	PHl3 MFC set to  0.000000
2/7/2011	9:36:50 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:36:50 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:36:50 PM	Tube furnace set to 0
2/7/2011	9:37:50 PM	Helium valve closed
2/7/2011	9:37:50 PM	H2 valve closed
2/7/2011	9:37:50 PM	BCl3 valve closed
2/7/2011	9:37:50 PM	PH3 valve closed
2/7/2011	9:37:50 PM	SiCl4 pre valve closed
2/7/2011	9:37:50 PM	SiCl4 post valve closed
2/7/2011	9:37:50 PM	Bubbler valve closed
2/7/2011	9:37:50 PM	Main Vac valve opened
2/7/2011	9:37:50 PM	Bypass valve opened
2/7/2011	9:37:50 PM	Helium MFC set to  0.000000
2/7/2011	9:37:50 PM	H2 MFC set to  0.000000
2/7/2011	9:37:50 PM	BCl3 MFC set to  0.000000
2/7/2011	9:37:50 PM	PHl3 MFC set to  0.000000
2/7/2011	9:37:50 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:37:50 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:37:50 PM	Tube furnace set to 0
2/7/2011	9:38:50 PM	H2 valve closed
2/7/2011	9:38:50 PM	BCl3 valve closed
2/7/2011	9:38:50 PM	PH3 valve closed
2/7/2011	9:38:50 PM	SiCl4 pre valve closed
2/7/2011	9:38:50 PM	SiCl4 post valve closed
2/7/2011	9:38:50 PM	Bubbler valve closed
2/7/2011	9:38:50 PM	Helium valve opened
2/7/2011	9:38:50 PM	Main Vac valve opened
2/7/2011	9:38:50 PM	Bypass valve opened
2/7/2011	9:38:50 PM	Helium MFC set to  100.000000
2/7/2011	9:38:50 PM	H2 MFC set to  0.000000
2/7/2011	9:38:50 PM	BCl3 MFC set to  0.000000
2/7/2011	9:38:50 PM	PHl3 MFC set to  0.000000
2/7/2011	9:38:50 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:38:50 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:38:51 PM	Tube furnace set to 0
2/7/2011	9:39:51 PM	Helium valve closed
2/7/2011	9:39:51 PM	H2 valve closed
2/7/2011	9:39:51 PM	BCl3 valve closed
2/7/2011	9:39:51 PM	PH3 valve closed
2/7/2011	9:39:51 PM	SiCl4 pre valve closed
2/7/2011	9:39:51 PM	SiCl4 post valve closed
2/7/2011	9:39:51 PM	Bubbler valve closed
2/7/2011	9:39:51 PM	Main Vac valve opened
2/7/2011	9:39:51 PM	Bypass valve opened
2/7/2011	9:39:51 PM	Helium MFC set to  0.000000
2/7/2011	9:39:51 PM	H2 MFC set to  0.000000
2/7/2011	9:39:51 PM	BCl3 MFC set to  0.000000
2/7/2011	9:39:51 PM	PHl3 MFC set to  0.000000
2/7/2011	9:39:51 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:39:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:39:51 PM	Tube furnace set to 0
2/7/2011	9:40:51 PM	H2 valve closed
2/7/2011	9:40:51 PM	BCl3 valve closed
2/7/2011	9:40:51 PM	PH3 valve closed
2/7/2011	9:40:51 PM	SiCl4 pre valve closed
2/7/2011	9:40:51 PM	SiCl4 post valve closed
2/7/2011	9:40:51 PM	Bubbler valve closed
2/7/2011	9:40:51 PM	Helium valve opened
2/7/2011	9:40:51 PM	Main Vac valve opened
2/7/2011	9:40:51 PM	Bypass valve opened
2/7/2011	9:40:51 PM	Helium MFC set to  100.000000
2/7/2011	9:40:51 PM	H2 MFC set to  0.000000
2/7/2011	9:40:51 PM	BCl3 MFC set to  0.000000
2/7/2011	9:40:51 PM	PHl3 MFC set to  0.000000
2/7/2011	9:40:51 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:40:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:40:51 PM	Tube furnace set to 0
2/7/2011	9:41:51 PM	Helium valve closed
2/7/2011	9:41:51 PM	H2 valve closed
2/7/2011	9:41:51 PM	BCl3 valve closed
2/7/2011	9:41:51 PM	PH3 valve closed
2/7/2011	9:41:51 PM	SiCl4 pre valve closed
2/7/2011	9:41:51 PM	SiCl4 post valve closed
2/7/2011	9:41:51 PM	Bubbler valve closed
2/7/2011	9:41:51 PM	Main Vac valve opened
2/7/2011	9:41:51 PM	Bypass valve opened
2/7/2011	9:41:51 PM	Helium MFC set to  0.000000
2/7/2011	9:41:51 PM	H2 MFC set to  0.000000
2/7/2011	9:41:51 PM	BCl3 MFC set to  0.000000
2/7/2011	9:41:51 PM	PHl3 MFC set to  0.000000
2/7/2011	9:41:51 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:41:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:41:51 PM	Tube furnace set to 0
2/7/2011	9:42:51 PM	H2 valve closed
2/7/2011	9:42:51 PM	BCl3 valve closed
2/7/2011	9:42:51 PM	PH3 valve closed
2/7/2011	9:42:51 PM	SiCl4 pre valve closed
2/7/2011	9:42:51 PM	SiCl4 post valve closed
2/7/2011	9:42:51 PM	Bubbler valve closed
2/7/2011	9:42:51 PM	Helium valve opened
2/7/2011	9:42:51 PM	Main Vac valve opened
2/7/2011	9:42:51 PM	Bypass valve opened
2/7/2011	9:42:51 PM	Helium MFC set to  100.000000
2/7/2011	9:42:51 PM	H2 MFC set to  0.000000
2/7/2011	9:42:51 PM	BCl3 MFC set to  0.000000
2/7/2011	9:42:51 PM	PHl3 MFC set to  0.000000
2/7/2011	9:42:51 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:42:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:42:51 PM	Tube furnace set to 0
2/7/2011	9:43:51 PM	Helium valve closed
2/7/2011	9:43:51 PM	H2 valve closed
2/7/2011	9:43:51 PM	BCl3 valve closed
2/7/2011	9:43:51 PM	PH3 valve closed
2/7/2011	9:43:51 PM	SiCl4 pre valve closed
2/7/2011	9:43:51 PM	SiCl4 post valve closed
2/7/2011	9:43:51 PM	Bubbler valve closed
2/7/2011	9:43:51 PM	Main Vac valve opened
2/7/2011	9:43:51 PM	Bypass valve opened
2/7/2011	9:43:51 PM	Helium MFC set to  0.000000
2/7/2011	9:43:51 PM	H2 MFC set to  0.000000
2/7/2011	9:43:51 PM	BCl3 MFC set to  0.000000
2/7/2011	9:43:51 PM	PHl3 MFC set to  0.000000
2/7/2011	9:43:51 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:43:51 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:43:52 PM	Tube furnace set to 0
2/7/2011	9:44:52 PM	H2 valve closed
2/7/2011	9:44:52 PM	BCl3 valve closed
2/7/2011	9:44:52 PM	PH3 valve closed
2/7/2011	9:44:52 PM	SiCl4 pre valve closed
2/7/2011	9:44:52 PM	SiCl4 post valve closed
2/7/2011	9:44:52 PM	Bubbler valve closed
2/7/2011	9:44:52 PM	Helium valve opened
2/7/2011	9:44:52 PM	Main Vac valve opened
2/7/2011	9:44:52 PM	Bypass valve opened
2/7/2011	9:44:52 PM	Helium MFC set to  100.000000
2/7/2011	9:44:52 PM	H2 MFC set to  0.000000
2/7/2011	9:44:52 PM	BCl3 MFC set to  0.000000
2/7/2011	9:44:52 PM	PHl3 MFC set to  0.000000
2/7/2011	9:44:52 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:44:52 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:44:52 PM	Tube furnace set to 0
2/7/2011	9:45:52 PM	Helium valve closed
2/7/2011	9:45:52 PM	H2 valve closed
2/7/2011	9:45:52 PM	BCl3 valve closed
2/7/2011	9:45:52 PM	PH3 valve closed
2/7/2011	9:45:52 PM	SiCl4 pre valve closed
2/7/2011	9:45:52 PM	SiCl4 post valve closed
2/7/2011	9:45:52 PM	Bubbler valve closed
2/7/2011	9:45:52 PM	Main Vac valve opened
2/7/2011	9:45:52 PM	Bypass valve opened
2/7/2011	9:45:52 PM	Helium MFC set to  0.000000
2/7/2011	9:45:52 PM	H2 MFC set to  0.000000
2/7/2011	9:45:52 PM	BCl3 MFC set to  0.000000
2/7/2011	9:45:52 PM	PHl3 MFC set to  0.000000
2/7/2011	9:45:52 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:45:52 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:45:52 PM	Tube furnace set to 0
2/7/2011	9:45:53 PM	Run finished at 9:45 PM
2/7/2011	9:45:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/7/2011	9:49:58 PM	Recipe started at 9:49 PM
2/7/2011	9:49:58 PM	Helium valve closed
2/7/2011	9:49:58 PM	BCl3 valve closed
2/7/2011	9:49:58 PM	PH3 valve closed
2/7/2011	9:49:58 PM	SiCl4 pre valve closed
2/7/2011	9:49:58 PM	SiCl4 post valve closed
2/7/2011	9:49:58 PM	Main Vac valve closed
2/7/2011	9:49:58 PM	Bypass valve closed
2/7/2011	9:49:58 PM	Bubbler valve closed
2/7/2011	9:49:58 PM	H2 valve opened
2/7/2011	9:49:58 PM	Helium MFC set to  0.000000
2/7/2011	9:49:58 PM	H2 MFC set to  500.000000
2/7/2011	9:49:58 PM	BCl3 MFC set to  0.000000
2/7/2011	9:49:58 PM	PHl3 MFC set to  0.000000
2/7/2011	9:49:58 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:49:58 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:49:58 PM	Tube furnace set to 0
2/7/2011	9:51:18 PM	Helium valve closed
2/7/2011	9:51:18 PM	BCl3 valve closed
2/7/2011	9:51:18 PM	PH3 valve closed
2/7/2011	9:51:18 PM	SiCl4 pre valve closed
2/7/2011	9:51:18 PM	SiCl4 post valve closed
2/7/2011	9:51:18 PM	Main Vac valve closed
2/7/2011	9:51:18 PM	Bypass valve closed
2/7/2011	9:51:18 PM	H2 valve opened
2/7/2011	9:51:18 PM	Bubbler valve opened
2/7/2011	9:51:18 PM	Helium MFC set to  0.000000
2/7/2011	9:51:18 PM	H2 MFC set to  500.000000
2/7/2011	9:51:18 PM	BCl3 MFC set to  0.000000
2/7/2011	9:51:18 PM	PHl3 MFC set to  0.000000
2/7/2011	9:51:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	9:51:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	9:51:18 PM	Tube furnace set to 1000
2/7/2011	10:11:18 PM	Helium valve closed
2/7/2011	10:11:18 PM	PH3 valve closed
2/7/2011	10:11:18 PM	Main Vac valve closed
2/7/2011	10:11:18 PM	Bypass valve closed
2/7/2011	10:11:18 PM	H2 valve opened
2/7/2011	10:11:18 PM	BCl3 valve opened
2/7/2011	10:11:18 PM	SiCl4 pre valve opened
2/7/2011	10:11:18 PM	SiCl4 post valve opened
2/7/2011	10:11:18 PM	Bubbler valve opened
2/7/2011	10:11:18 PM	Helium MFC set to  0.000000
2/7/2011	10:11:18 PM	H2 MFC set to  500.000000
2/7/2011	10:11:18 PM	BCl3 MFC set to  3.000000
2/7/2011	10:11:18 PM	PHl3 MFC set to  0.000000
2/7/2011	10:11:18 PM	SiCl4 MFC set to  42.500000
2/7/2011	10:11:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	10:11:18 PM	Tube furnace set to 1000
2/7/2011	10:26:18 PM	H2 valve closed
2/7/2011	10:26:18 PM	BCl3 valve closed
2/7/2011	10:26:18 PM	PH3 valve closed
2/7/2011	10:26:18 PM	SiCl4 pre valve closed
2/7/2011	10:26:18 PM	SiCl4 post valve closed
2/7/2011	10:26:18 PM	Main Vac valve closed
2/7/2011	10:26:18 PM	Bypass valve closed
2/7/2011	10:26:18 PM	Helium valve opened
2/7/2011	10:26:18 PM	Bubbler valve opened
2/7/2011	10:26:18 PM	Helium MFC set to  500.000000
2/7/2011	10:26:18 PM	H2 MFC set to  0.000000
2/7/2011	10:26:18 PM	BCl3 MFC set to  0.000000
2/7/2011	10:26:18 PM	PHl3 MFC set to  0.000000
2/7/2011	10:26:18 PM	SiCl4 MFC set to  0.000000
2/7/2011	10:26:18 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	10:26:19 PM	Tube furnace set to 0
2/7/2011	10:43:22 PM	Helium valve closed
2/7/2011	10:43:22 PM	H2 valve closed
2/7/2011	10:43:22 PM	BCl3 valve closed
2/7/2011	10:43:22 PM	PH3 valve closed
2/7/2011	10:43:22 PM	SiCl4 pre valve closed
2/7/2011	10:43:22 PM	SiCl4 post valve closed
2/7/2011	10:43:22 PM	Main Vac valve closed
2/7/2011	10:43:22 PM	Bypass valve closed
2/7/2011	10:43:22 PM	Bubbler valve closed
2/7/2011	10:43:22 PM	Helium MFC set to  0.000000
2/7/2011	10:43:22 PM	H2 MFC set to  0.000000
2/7/2011	10:43:22 PM	BCl3 MFC set to  0.000000
2/7/2011	10:43:22 PM	PHl3 MFC set to  0.000000
2/7/2011	10:43:22 PM	SiCl4 MFC set to  0.000000
2/7/2011	10:43:22 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	10:43:22 PM	Tube furnace set to 0
2/7/2011	10:43:23 PM	Run finished at 10:43 PM
2/7/2011	10:48:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2011	10:48:52 PM	Recipe started at 10:48 PM
2/7/2011	10:48:52 PM	Helium valve closed
2/7/2011	10:48:52 PM	H2 valve closed
2/7/2011	10:48:52 PM	BCl3 valve closed
2/7/2011	10:48:52 PM	PH3 valve closed
2/7/2011	10:48:52 PM	SiCl4 pre valve closed
2/7/2011	10:48:52 PM	SiCl4 post valve closed
2/7/2011	10:48:52 PM	Main Vac valve closed
2/7/2011	10:48:52 PM	Bubbler valve closed
2/7/2011	10:48:52 PM	Bypass valve opened
2/7/2011	10:48:52 PM	Helium MFC set to  0.000000
2/7/2011	10:48:52 PM	H2 MFC set to  0.000000
2/7/2011	10:48:52 PM	BCl3 MFC set to  0.000000
2/7/2011	10:48:52 PM	PHl3 MFC set to  0.000000
2/7/2011	10:48:52 PM	SiCl4 MFC set to  0.000000
2/7/2011	10:48:52 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	10:48:52 PM	Tube furnace set to 0
2/7/2011	10:49:24 PM	Helium valve closed
2/7/2011	10:49:24 PM	H2 valve closed
2/7/2011	10:49:24 PM	BCl3 valve closed
2/7/2011	10:49:24 PM	PH3 valve closed
2/7/2011	10:49:24 PM	SiCl4 pre valve closed
2/7/2011	10:49:24 PM	SiCl4 post valve closed
2/7/2011	10:49:24 PM	Bubbler valve closed
2/7/2011	10:49:24 PM	Main Vac valve opened
2/7/2011	10:49:24 PM	Bypass valve opened
2/7/2011	10:49:24 PM	Helium MFC set to  0.000000
2/7/2011	10:49:24 PM	H2 MFC set to  0.000000
2/7/2011	10:49:24 PM	BCl3 MFC set to  0.000000
2/7/2011	10:49:24 PM	PHl3 MFC set to  0.000000
2/7/2011	10:49:24 PM	SiCl4 MFC set to  0.000000
2/7/2011	10:49:24 PM	Bypass solenoid MFC set to  0.000000
2/7/2011	10:49:24 PM	Tube furnace set to 0
2/7/2011	10:49:25 PM	Run finished at 10:49 PM
2/7/2011	10:49:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
